Matches in SemOpenAlex for { <https://semopenalex.org/work/W1990939766> ?p ?o ?g. }
- W1990939766 endingPage "2623" @default.
- W1990939766 startingPage "2614" @default.
- W1990939766 abstract "A key need for the development and testing of models suitable for chemically active, low pressure plasmas is detailed comparisons between model predictions and experimental measurements. In this paper, a two-dimensional, axisymmetric fluid model of an inductively coupled plasma is described, and model predictions are compared to the experimental measurements of P. A. Miller, G. A. Hebner, K. E. Greenberg, P. D. Pochan, and B. P. Aragon [J. Res. Natl. Inst. Stand. Technol. 100, 427 (1995)] of electron density, electron temperature, and plasma potential. Comparisons between model predictions and experimental measurements were made in argon and chlorine discharges. Qualitative to semiquantitative agreement between the model predictions and experimental diagnostics was observed, suggesting that assumptions made in the model are reasonably accurate." @default.
- W1990939766 created "2016-06-24" @default.
- W1990939766 creator A5008915317 @default.
- W1990939766 creator A5075183920 @default.
- W1990939766 creator A5077850920 @default.
- W1990939766 date "1996-09-01" @default.
- W1990939766 modified "2023-09-29" @default.
- W1990939766 title "Two-dimensional fluid model of an inductively coupled plasma with comparison to experimental spatial profiles" @default.
- W1990939766 cites W1968087053 @default.
- W1990939766 cites W1976121193 @default.
- W1990939766 cites W1987841016 @default.
- W1990939766 cites W1993224379 @default.
- W1990939766 cites W1998927883 @default.
- W1990939766 cites W1999780918 @default.
- W1990939766 cites W2000998029 @default.
- W1990939766 cites W2001653578 @default.
- W1990939766 cites W2001821898 @default.
- W1990939766 cites W2020015144 @default.
- W1990939766 cites W2020831905 @default.
- W1990939766 cites W2036133407 @default.
- W1990939766 cites W2040532696 @default.
- W1990939766 cites W2042071870 @default.
- W1990939766 cites W2045027252 @default.
- W1990939766 cites W2045669053 @default.
- W1990939766 cites W2046017347 @default.
- W1990939766 cites W2066310710 @default.
- W1990939766 cites W2067566148 @default.
- W1990939766 cites W2068847633 @default.
- W1990939766 cites W2070127500 @default.
- W1990939766 cites W2079980688 @default.
- W1990939766 cites W2080379849 @default.
- W1990939766 cites W2083880373 @default.
- W1990939766 cites W2089285532 @default.
- W1990939766 cites W2092174669 @default.
- W1990939766 cites W2139034438 @default.
- W1990939766 doi "https://doi.org/10.1063/1.363169" @default.
- W1990939766 hasPublicationYear "1996" @default.
- W1990939766 type Work @default.
- W1990939766 sameAs 1990939766 @default.
- W1990939766 citedByCount "169" @default.
- W1990939766 countsByYear W19909397662012 @default.
- W1990939766 countsByYear W19909397662013 @default.
- W1990939766 countsByYear W19909397662014 @default.
- W1990939766 countsByYear W19909397662015 @default.
- W1990939766 countsByYear W19909397662016 @default.
- W1990939766 countsByYear W19909397662017 @default.
- W1990939766 countsByYear W19909397662018 @default.
- W1990939766 countsByYear W19909397662019 @default.
- W1990939766 countsByYear W19909397662020 @default.
- W1990939766 countsByYear W19909397662021 @default.
- W1990939766 countsByYear W19909397662022 @default.
- W1990939766 countsByYear W19909397662023 @default.
- W1990939766 crossrefType "journal-article" @default.
- W1990939766 hasAuthorship W1990939766A5008915317 @default.
- W1990939766 hasAuthorship W1990939766A5075183920 @default.
- W1990939766 hasAuthorship W1990939766A5077850920 @default.
- W1990939766 hasConcept C121332964 @default.
- W1990939766 hasConcept C147120987 @default.
- W1990939766 hasConcept C184779094 @default.
- W1990939766 hasConcept C185544564 @default.
- W1990939766 hasConcept C185592680 @default.
- W1990939766 hasConcept C192039680 @default.
- W1990939766 hasConcept C22175881 @default.
- W1990939766 hasConcept C33026886 @default.
- W1990939766 hasConcept C43503373 @default.
- W1990939766 hasConcept C547737533 @default.
- W1990939766 hasConcept C57879066 @default.
- W1990939766 hasConcept C82706917 @default.
- W1990939766 hasConcept C95974651 @default.
- W1990939766 hasConcept C97355855 @default.
- W1990939766 hasConceptScore W1990939766C121332964 @default.
- W1990939766 hasConceptScore W1990939766C147120987 @default.
- W1990939766 hasConceptScore W1990939766C184779094 @default.
- W1990939766 hasConceptScore W1990939766C185544564 @default.
- W1990939766 hasConceptScore W1990939766C185592680 @default.
- W1990939766 hasConceptScore W1990939766C192039680 @default.
- W1990939766 hasConceptScore W1990939766C22175881 @default.
- W1990939766 hasConceptScore W1990939766C33026886 @default.
- W1990939766 hasConceptScore W1990939766C43503373 @default.
- W1990939766 hasConceptScore W1990939766C547737533 @default.
- W1990939766 hasConceptScore W1990939766C57879066 @default.
- W1990939766 hasConceptScore W1990939766C82706917 @default.
- W1990939766 hasConceptScore W1990939766C95974651 @default.
- W1990939766 hasConceptScore W1990939766C97355855 @default.
- W1990939766 hasIssue "5" @default.
- W1990939766 hasLocation W19909397661 @default.
- W1990939766 hasOpenAccess W1990939766 @default.
- W1990939766 hasPrimaryLocation W19909397661 @default.
- W1990939766 hasRelatedWork W1609035246 @default.
- W1990939766 hasRelatedWork W1610193437 @default.
- W1990939766 hasRelatedWork W1619276345 @default.
- W1990939766 hasRelatedWork W1982160538 @default.
- W1990939766 hasRelatedWork W1996716935 @default.
- W1990939766 hasRelatedWork W2330478120 @default.
- W1990939766 hasRelatedWork W2332497334 @default.
- W1990939766 hasRelatedWork W2900091209 @default.
- W1990939766 hasRelatedWork W3161428273 @default.
- W1990939766 hasRelatedWork W4367186977 @default.