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- W1991004478 endingPage "343" @default.
- W1991004478 startingPage "340" @default.
- W1991004478 abstract "Semi-insulating (1 0 0) GaAs single crystalline substrates have been doubly Al+-implanted using ion beams of the 250 keV energy and the fluence F = 3.5 × 1016 cm−2, and 100 keV with F = 9.6 × 1015 cm−2 at six target temperatures ranging from 250 to 500 °C. The radiation damage introduced by such “hot implantation” was subsequently investigated by Rutherford Backscattering Spectrometry with Channeling (RBS-C) and Variable Angle Spectroscopic Ellipsometry (VASE) techniques. Using these experimental methods we determined a degree of lattice disorder. With the increasing implantation temperature the degree of disorder substantially decreases. No evidence of full amorphization of the implanted GaAs layers has been found in the present studies. The results of non-destructive ellipsometric characterization are in good agreement with the RBS-C investigations." @default.
- W1991004478 created "2016-06-24" @default.
- W1991004478 creator A5012347011 @default.
- W1991004478 creator A5023172531 @default.
- W1991004478 creator A5055155775 @default.
- W1991004478 creator A5069348243 @default.
- W1991004478 creator A5070765241 @default.
- W1991004478 creator A5089029801 @default.
- W1991004478 date "2011-03-01" @default.
- W1991004478 modified "2023-10-17" @default.
- W1991004478 title "RBS-C and ellipsometric investigations of radiation damage in hot-implanted GaAs layers" @default.
- W1991004478 cites W112633697 @default.
- W1991004478 cites W1966788774 @default.
- W1991004478 cites W2013959917 @default.
- W1991004478 cites W2024180452 @default.
- W1991004478 cites W2025599140 @default.
- W1991004478 cites W2034889959 @default.
- W1991004478 cites W2090946917 @default.
- W1991004478 cites W2094285478 @default.
- W1991004478 cites W2137866734 @default.
- W1991004478 cites W2138196318 @default.
- W1991004478 doi "https://doi.org/10.1016/j.mseb.2011.01.001" @default.
- W1991004478 hasPublicationYear "2011" @default.
- W1991004478 type Work @default.
- W1991004478 sameAs 1991004478 @default.
- W1991004478 citedByCount "5" @default.
- W1991004478 countsByYear W19910044782013 @default.
- W1991004478 countsByYear W19910044782014 @default.
- W1991004478 countsByYear W19910044782016 @default.
- W1991004478 countsByYear W19910044782018 @default.
- W1991004478 crossrefType "journal-article" @default.
- W1991004478 hasAuthorship W1991004478A5012347011 @default.
- W1991004478 hasAuthorship W1991004478A5023172531 @default.
- W1991004478 hasAuthorship W1991004478A5055155775 @default.
- W1991004478 hasAuthorship W1991004478A5069348243 @default.
- W1991004478 hasAuthorship W1991004478A5070765241 @default.
- W1991004478 hasAuthorship W1991004478A5089029801 @default.
- W1991004478 hasConcept C111337013 @default.
- W1991004478 hasConcept C113196181 @default.
- W1991004478 hasConcept C120665830 @default.
- W1991004478 hasConcept C121332964 @default.
- W1991004478 hasConcept C145148216 @default.
- W1991004478 hasConcept C153385146 @default.
- W1991004478 hasConcept C153428861 @default.
- W1991004478 hasConcept C171250308 @default.
- W1991004478 hasConcept C178790620 @default.
- W1991004478 hasConcept C18293161 @default.
- W1991004478 hasConcept C185544564 @default.
- W1991004478 hasConcept C185592680 @default.
- W1991004478 hasConcept C19067145 @default.
- W1991004478 hasConcept C192562407 @default.
- W1991004478 hasConcept C22078206 @default.
- W1991004478 hasConcept C2780547777 @default.
- W1991004478 hasConcept C2781028716 @default.
- W1991004478 hasConcept C41823505 @default.
- W1991004478 hasConcept C43617362 @default.
- W1991004478 hasConceptScore W1991004478C111337013 @default.
- W1991004478 hasConceptScore W1991004478C113196181 @default.
- W1991004478 hasConceptScore W1991004478C120665830 @default.
- W1991004478 hasConceptScore W1991004478C121332964 @default.
- W1991004478 hasConceptScore W1991004478C145148216 @default.
- W1991004478 hasConceptScore W1991004478C153385146 @default.
- W1991004478 hasConceptScore W1991004478C153428861 @default.
- W1991004478 hasConceptScore W1991004478C171250308 @default.
- W1991004478 hasConceptScore W1991004478C178790620 @default.
- W1991004478 hasConceptScore W1991004478C18293161 @default.
- W1991004478 hasConceptScore W1991004478C185544564 @default.
- W1991004478 hasConceptScore W1991004478C185592680 @default.
- W1991004478 hasConceptScore W1991004478C19067145 @default.
- W1991004478 hasConceptScore W1991004478C192562407 @default.
- W1991004478 hasConceptScore W1991004478C22078206 @default.
- W1991004478 hasConceptScore W1991004478C2780547777 @default.
- W1991004478 hasConceptScore W1991004478C2781028716 @default.
- W1991004478 hasConceptScore W1991004478C41823505 @default.
- W1991004478 hasConceptScore W1991004478C43617362 @default.
- W1991004478 hasIssue "4" @default.
- W1991004478 hasLocation W19910044781 @default.
- W1991004478 hasOpenAccess W1991004478 @default.
- W1991004478 hasPrimaryLocation W19910044781 @default.
- W1991004478 hasRelatedWork W1985873695 @default.
- W1991004478 hasRelatedWork W2011672905 @default.
- W1991004478 hasRelatedWork W2027105637 @default.
- W1991004478 hasRelatedWork W2076021990 @default.
- W1991004478 hasRelatedWork W2087446285 @default.
- W1991004478 hasRelatedWork W2108717591 @default.
- W1991004478 hasRelatedWork W2289214184 @default.
- W1991004478 hasRelatedWork W2790868607 @default.
- W1991004478 hasRelatedWork W4221059972 @default.
- W1991004478 hasRelatedWork W2089189484 @default.
- W1991004478 hasVolume "176" @default.
- W1991004478 isParatext "false" @default.
- W1991004478 isRetracted "false" @default.
- W1991004478 magId "1991004478" @default.
- W1991004478 workType "article" @default.