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- W1991052483 abstract "The tools of optical measurement of deformation are increasingly used to characterize both the mechanical and the thermal properties of MEMS components and especially membranes. In the paper the application of optical methods for membranes tension measurement, their thickness variations and vibrational mode shapes identification of membrane like microcomponents is reported. Using of several sophisticated optical techniques is reviewed such as autocollimation observation of the radii of curvature of deflected 6-in. large membranes, Fizeau interferometry of membrane thickness, Laser doppler vibrometry for membrane vibration movement and deformation propagation and also time-average recording of vibrational mode structure. Specific features of the methods, their performances and limitations regarding practical experience of the exploitation are reported, too." @default.
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- W1991052483 date "2006-04-01" @default.
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- W1991052483 title "Mechanical characterization of membrane like microelectronic components" @default.
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- W1991052483 doi "https://doi.org/10.1016/j.mee.2006.01.020" @default.
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