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- W1991135306 abstract "Shrinking VLSI geometries have resulted in increasingly non-planar structures and current flows, necessitating lateral as well as vertical information on dopant distribution for device design, modelling and optimisation. Continuing demand for improved vertical resolution (1-10nm) has led to improvements in existing 1D dopant profiling techniques: new 2D techniques of reasonable resolution (20-25nm) are beginning to meet the demand for lateral information; 3D techniques at present are too low in resolution (0.5 micron) or sensitivity (1020/cc). The present status of dimensional compositional analysis techniques as applied to VLSI submicron structures is reviewed." @default.
- W1991135306 created "2016-06-24" @default.
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- W1991135306 date "1990-09-01" @default.
- W1991135306 modified "2023-09-25" @default.
- W1991135306 title "Compositional analysis of submicron silicon in one, two and three dimensions" @default.
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