Matches in SemOpenAlex for { <https://semopenalex.org/work/W1991231796> ?p ?o ?g. }
Showing items 1 to 88 of
88
with 100 items per page.
- W1991231796 abstract "A dual-wavelength optical pickup head is fabricated for laser direct writing. Both 405nm wavelength and 658nm wavelength are used in the pickup head. For exposing organic photo resists, the 405nm wavelength is used as the light source, and the 658nm wavelength is used for the focus servo. While for exposing inorganic photo resists, either wavelength may be used as the light source. It depends on the spot size we need. The numerical aperture (NA) of the objective lens is 0.6. The measured spot size of the objective lens is about 0.35μm at 405nm, and 0.66μm at 658nm. For the preliminary experiments, a spot with about 500nm in diameter and 120nm in depth is achieved for GeTeSnOx inorganic photo resist using the 405nm wavelength. The optimum exposing parameters are still in progress." @default.
- W1991231796 created "2016-06-24" @default.
- W1991231796 creator A5005745964 @default.
- W1991231796 creator A5006022901 @default.
- W1991231796 creator A5015843753 @default.
- W1991231796 creator A5041313942 @default.
- W1991231796 date "2011-08-01" @default.
- W1991231796 modified "2023-09-23" @default.
- W1991231796 title "Fabrication of a dual-wavelength optical pickup head for laser direct writing" @default.
- W1991231796 cites W1988686642 @default.
- W1991231796 cites W2023684538 @default.
- W1991231796 cites W2058034748 @default.
- W1991231796 cites W2072857583 @default.
- W1991231796 cites W2085280700 @default.
- W1991231796 cites W2104879169 @default.
- W1991231796 doi "https://doi.org/10.1109/iqec-cleo.2011.6193717" @default.
- W1991231796 hasPublicationYear "2011" @default.
- W1991231796 type Work @default.
- W1991231796 sameAs 1991231796 @default.
- W1991231796 citedByCount "0" @default.
- W1991231796 crossrefType "proceedings-article" @default.
- W1991231796 hasAuthorship W1991231796A5005745964 @default.
- W1991231796 hasAuthorship W1991231796A5006022901 @default.
- W1991231796 hasAuthorship W1991231796A5015843753 @default.
- W1991231796 hasAuthorship W1991231796A5041313942 @default.
- W1991231796 hasConcept C1135709 @default.
- W1991231796 hasConcept C114793014 @default.
- W1991231796 hasConcept C115961682 @default.
- W1991231796 hasConcept C120665830 @default.
- W1991231796 hasConcept C121332964 @default.
- W1991231796 hasConcept C127313418 @default.
- W1991231796 hasConcept C136525101 @default.
- W1991231796 hasConcept C142724271 @default.
- W1991231796 hasConcept C15336307 @default.
- W1991231796 hasConcept C154945302 @default.
- W1991231796 hasConcept C159108749 @default.
- W1991231796 hasConcept C171250308 @default.
- W1991231796 hasConcept C192562407 @default.
- W1991231796 hasConcept C204787440 @default.
- W1991231796 hasConcept C2776221269 @default.
- W1991231796 hasConcept C2779227376 @default.
- W1991231796 hasConcept C2780312720 @default.
- W1991231796 hasConcept C41008148 @default.
- W1991231796 hasConcept C49040817 @default.
- W1991231796 hasConcept C520434653 @default.
- W1991231796 hasConcept C53524968 @default.
- W1991231796 hasConcept C6260449 @default.
- W1991231796 hasConcept C71924100 @default.
- W1991231796 hasConceptScore W1991231796C1135709 @default.
- W1991231796 hasConceptScore W1991231796C114793014 @default.
- W1991231796 hasConceptScore W1991231796C115961682 @default.
- W1991231796 hasConceptScore W1991231796C120665830 @default.
- W1991231796 hasConceptScore W1991231796C121332964 @default.
- W1991231796 hasConceptScore W1991231796C127313418 @default.
- W1991231796 hasConceptScore W1991231796C136525101 @default.
- W1991231796 hasConceptScore W1991231796C142724271 @default.
- W1991231796 hasConceptScore W1991231796C15336307 @default.
- W1991231796 hasConceptScore W1991231796C154945302 @default.
- W1991231796 hasConceptScore W1991231796C159108749 @default.
- W1991231796 hasConceptScore W1991231796C171250308 @default.
- W1991231796 hasConceptScore W1991231796C192562407 @default.
- W1991231796 hasConceptScore W1991231796C204787440 @default.
- W1991231796 hasConceptScore W1991231796C2776221269 @default.
- W1991231796 hasConceptScore W1991231796C2779227376 @default.
- W1991231796 hasConceptScore W1991231796C2780312720 @default.
- W1991231796 hasConceptScore W1991231796C41008148 @default.
- W1991231796 hasConceptScore W1991231796C49040817 @default.
- W1991231796 hasConceptScore W1991231796C520434653 @default.
- W1991231796 hasConceptScore W1991231796C53524968 @default.
- W1991231796 hasConceptScore W1991231796C6260449 @default.
- W1991231796 hasConceptScore W1991231796C71924100 @default.
- W1991231796 hasLocation W19912317961 @default.
- W1991231796 hasOpenAccess W1991231796 @default.
- W1991231796 hasPrimaryLocation W19912317961 @default.
- W1991231796 hasRelatedWork W1633289617 @default.
- W1991231796 hasRelatedWork W1977332644 @default.
- W1991231796 hasRelatedWork W1978836613 @default.
- W1991231796 hasRelatedWork W1988918010 @default.
- W1991231796 hasRelatedWork W2025452462 @default.
- W1991231796 hasRelatedWork W2065157322 @default.
- W1991231796 hasRelatedWork W2073682629 @default.
- W1991231796 hasRelatedWork W2113105026 @default.
- W1991231796 hasRelatedWork W4321142838 @default.
- W1991231796 hasRelatedWork W942427343 @default.
- W1991231796 isParatext "false" @default.
- W1991231796 isRetracted "false" @default.
- W1991231796 magId "1991231796" @default.
- W1991231796 workType "article" @default.