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- W1991241025 abstract "A supermagnetron plasma apparatus with two band magnetron cathodes, which can form uniform magnetron plasma under a stationary magnetic field (about 160 G), was used to deposit a-CNx:H films at N2 gas concentrations of 0 and 70%. A high deposition rate of about 85±5 nm/min was obtained at a low dc self-bias voltage, between -20 and -62 V. The optical band gap could be controlled between 1.1 and 3.8 eV. The double-layer a-CNx:H films with optical band gaps of 2.2 eV (upper layer; N2 0%) and 1.5 eV (lower layer; N2 70%) formed on p-Si substrate showed a low-threshold-emission electric field of 9 V/μm." @default.
- W1991241025 created "2016-06-24" @default.
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- W1991241025 date "2014-06-03" @default.
- W1991241025 modified "2023-09-24" @default.
- W1991241025 title "Chemical vapor deposition of a-CNx:H films for electron field emission using band supermagnetron plasma" @default.
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- W1991241025 doi "https://doi.org/10.1088/1742-6596/518/1/012004" @default.
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