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- W1991255267 abstract "The effect of H plasma exposure parameters, such as power, pressure and temperature, on the Si-SiO <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sub> interface is investigated. Inductively coupled photoconductivity decay measurements indicate an increase in carrier recombination at the surfaces following atomic hydrogen exposure, as measured by an increase in the emitter saturation current density. This increase is chiefly due to the generation of additional, recombination active defects. These defects are not thermally stable and are removed by subsequent thermal treatments above 300°C in N <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sub> . In addition, atomic hydrogen results in the passivation of a certain fraction of thermally stable interface defects. However, the fraction of defects passivated is always lower than can be achieved by exposure to molecular hydrogen. Variation of sample temperature during atomic H exposure in the range 25-400°C does not have a significant impact on the passivation efficiency." @default.
- W1991255267 created "2016-06-24" @default.
- W1991255267 creator A5013682617 @default.
- W1991255267 creator A5055341082 @default.
- W1991255267 creator A5057921217 @default.
- W1991255267 creator A5090274540 @default.
- W1991255267 date "2009-06-01" @default.
- W1991255267 modified "2023-10-16" @default.
- W1991255267 title "The effect of exposure of Si-Sio<inf>2</inf> structure to atomic H by PECVD reactor" @default.
- W1991255267 cites W1481147453 @default.
- W1991255267 cites W1584452406 @default.
- W1991255267 cites W1983057182 @default.
- W1991255267 cites W1983085028 @default.
- W1991255267 cites W2014708246 @default.
- W1991255267 cites W2023022810 @default.
- W1991255267 cites W2056739308 @default.
- W1991255267 cites W2064072391 @default.
- W1991255267 cites W2114143845 @default.
- W1991255267 doi "https://doi.org/10.1109/pvsc.2009.5411704" @default.
- W1991255267 hasPublicationYear "2009" @default.
- W1991255267 type Work @default.
- W1991255267 sameAs 1991255267 @default.
- W1991255267 citedByCount "0" @default.
- W1991255267 crossrefType "proceedings-article" @default.
- W1991255267 hasAuthorship W1991255267A5013682617 @default.
- W1991255267 hasAuthorship W1991255267A5055341082 @default.
- W1991255267 hasAuthorship W1991255267A5057921217 @default.
- W1991255267 hasAuthorship W1991255267A5090274540 @default.
- W1991255267 hasConcept C104317684 @default.
- W1991255267 hasConcept C113196181 @default.
- W1991255267 hasConcept C114614502 @default.
- W1991255267 hasConcept C119599485 @default.
- W1991255267 hasConcept C127413603 @default.
- W1991255267 hasConcept C155891486 @default.
- W1991255267 hasConcept C156695909 @default.
- W1991255267 hasConcept C165801399 @default.
- W1991255267 hasConcept C171250308 @default.
- W1991255267 hasConcept C178790620 @default.
- W1991255267 hasConcept C185592680 @default.
- W1991255267 hasConcept C192562407 @default.
- W1991255267 hasConcept C2779227376 @default.
- W1991255267 hasConcept C33574316 @default.
- W1991255267 hasConcept C33923547 @default.
- W1991255267 hasConcept C38347018 @default.
- W1991255267 hasConcept C49040817 @default.
- W1991255267 hasConcept C512968161 @default.
- W1991255267 hasConcept C544956773 @default.
- W1991255267 hasConcept C55493867 @default.
- W1991255267 hasConcept C9930424 @default.
- W1991255267 hasConceptScore W1991255267C104317684 @default.
- W1991255267 hasConceptScore W1991255267C113196181 @default.
- W1991255267 hasConceptScore W1991255267C114614502 @default.
- W1991255267 hasConceptScore W1991255267C119599485 @default.
- W1991255267 hasConceptScore W1991255267C127413603 @default.
- W1991255267 hasConceptScore W1991255267C155891486 @default.
- W1991255267 hasConceptScore W1991255267C156695909 @default.
- W1991255267 hasConceptScore W1991255267C165801399 @default.
- W1991255267 hasConceptScore W1991255267C171250308 @default.
- W1991255267 hasConceptScore W1991255267C178790620 @default.
- W1991255267 hasConceptScore W1991255267C185592680 @default.
- W1991255267 hasConceptScore W1991255267C192562407 @default.
- W1991255267 hasConceptScore W1991255267C2779227376 @default.
- W1991255267 hasConceptScore W1991255267C33574316 @default.
- W1991255267 hasConceptScore W1991255267C33923547 @default.
- W1991255267 hasConceptScore W1991255267C38347018 @default.
- W1991255267 hasConceptScore W1991255267C49040817 @default.
- W1991255267 hasConceptScore W1991255267C512968161 @default.
- W1991255267 hasConceptScore W1991255267C544956773 @default.
- W1991255267 hasConceptScore W1991255267C55493867 @default.
- W1991255267 hasConceptScore W1991255267C9930424 @default.
- W1991255267 hasLocation W19912552671 @default.
- W1991255267 hasOpenAccess W1991255267 @default.
- W1991255267 hasPrimaryLocation W19912552671 @default.
- W1991255267 hasRelatedWork W1191712395 @default.
- W1991255267 hasRelatedWork W1521620707 @default.
- W1991255267 hasRelatedWork W1622222911 @default.
- W1991255267 hasRelatedWork W2033476459 @default.
- W1991255267 hasRelatedWork W2079842629 @default.
- W1991255267 hasRelatedWork W2079866538 @default.
- W1991255267 hasRelatedWork W2090143721 @default.
- W1991255267 hasRelatedWork W2262050257 @default.
- W1991255267 hasRelatedWork W2336502962 @default.
- W1991255267 hasRelatedWork W2970585551 @default.
- W1991255267 isParatext "false" @default.
- W1991255267 isRetracted "false" @default.
- W1991255267 magId "1991255267" @default.
- W1991255267 workType "article" @default.