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• W1991269710 abstract "This work develops a novel 4 × 4 optical phase shifting micromirror array that achieves a λ/4 vertical displacement and makes the mirror peak-to-valley deformation within λ/10 (514 nm light source). Each individual micromirror pixel is controllable and driven by an electrostatic parallel plate actuator. The mirror reflective surface is an aluminum layer with a high optical reflectivity exceeding 90%. This device achieves a high fill factor of more than 90% without an additional flip-chip bonding process due to the parallel plate actuator and the hidden suspension beam structures. The phase shifter array is fabricated using the Taiwan Semiconductor Manufacturing Company (TSMC) 0.35 μm 2p4m CMOS process and post-CMOS process. An in-house post-process is utilized to reserve a 40 μm thick bulk-silicon under the 200 μm X 200 μm mirror. This eliminates mirror deformation from residual stress after the device is released. The micromirror demonstrates a vertical displacement of λ/4 at only 3 V and the resonant frequency is 3.6 kHz. Industry can use this phase-shifting micromirror array as a spatial light modulator in holographic data storage systems in the future." @default.
• W1991269710 created "2016-06-24" @default.
• W1991269710 creator A5028646086 @default.
• W1991269710 creator A5038957788 @default.
• W1991269710 creator A5079198168 @default.
• W1991269710 date "2010-09-01" @default.
• W1991269710 modified "2023-09-28" @default.
• W1991269710 title "CMOS-MEMS Based Optical Electrostatic Phase Shifter Array With Low Driving Voltage and High Fill Factor" @default.
• W1991269710 cites W1968080966 @default.
• W1991269710 cites W1988264504 @default.
• W1991269710 cites W1988793352 @default.
• W1991269710 cites W2003630946 @default.
• W1991269710 cites W2015621384 @default.
• W1991269710 cites W2022504062 @default.
• W1991269710 cites W2031252812 @default.
• W1991269710 cites W2042007386 @default.
• W1991269710 cites W2044638566 @default.
• W1991269710 cites W2045539736 @default.
• W1991269710 cites W2056477797 @default.
• W1991269710 cites W2070315367 @default.
• W1991269710 cites W2073595316 @default.
• W1991269710 cites W2078339434 @default.
• W1991269710 cites W2083240807 @default.
• W1991269710 cites W2096287465 @default.
• W1991269710 cites W2103793751 @default.
• W1991269710 cites W2105341635 @default.
• W1991269710 cites W2112726158 @default.
• W1991269710 cites W2114712537 @default.
• W1991269710 cites W2119412547 @default.
• W1991269710 cites W2122818202 @default.
• W1991269710 cites W2126628723 @default.
• W1991269710 cites W2147253086 @default.
• W1991269710 cites W2159744384 @default.
• W1991269710 cites W2162869577 @default.
• W1991269710 cites W2170254926 @default.
• W1991269710 cites W2314802242 @default.
• W1991269710 doi "https://doi.org/10.1109/jqe.2010.2043502" @default.
• W1991269710 hasPublicationYear "2010" @default.
• W1991269710 type Work @default.
• W1991269710 sameAs 1991269710 @default.
• W1991269710 citedByCount "0" @default.
• W1991269710 crossrefType "journal-article" @default.
• W1991269710 hasAuthorship W1991269710A5028646086 @default.
• W1991269710 hasAuthorship W1991269710A5038957788 @default.
• W1991269710 hasAuthorship W1991269710A5079198168 @default.
• W1991269710 hasBestOaLocation W19912697102 @default.
• W1991269710 hasConcept C103864889 @default.
• W1991269710 hasConcept C119599485 @default.
• W1991269710 hasConcept C120665830 @default.
• W1991269710 hasConcept C121332964 @default.
• W1991269710 hasConcept C127413603 @default.
• W1991269710 hasConcept C136525101 @default.
• W1991269710 hasConcept C142724271 @default.
• W1991269710 hasConcept C155840801 @default.
• W1991269710 hasConcept C172707124 @default.
• W1991269710 hasConcept C192562407 @default.
• W1991269710 hasConcept C204787440 @default.
• W1991269710 hasConcept C2777903624 @default.
• W1991269710 hasConcept C37977207 @default.
• W1991269710 hasConcept C46362747 @default.
• W1991269710 hasConcept C49040817 @default.
• W1991269710 hasConcept C71924100 @default.
• W1991269710 hasConcept C90327742 @default.
• W1991269710 hasConceptScore W1991269710C103864889 @default.
• W1991269710 hasConceptScore W1991269710C119599485 @default.
• W1991269710 hasConceptScore W1991269710C120665830 @default.
• W1991269710 hasConceptScore W1991269710C121332964 @default.
• W1991269710 hasConceptScore W1991269710C127413603 @default.
• W1991269710 hasConceptScore W1991269710C136525101 @default.
• W1991269710 hasConceptScore W1991269710C142724271 @default.
• W1991269710 hasConceptScore W1991269710C155840801 @default.
• W1991269710 hasConceptScore W1991269710C172707124 @default.
• W1991269710 hasConceptScore W1991269710C192562407 @default.
• W1991269710 hasConceptScore W1991269710C204787440 @default.
• W1991269710 hasConceptScore W1991269710C2777903624 @default.
• W1991269710 hasConceptScore W1991269710C37977207 @default.
• W1991269710 hasConceptScore W1991269710C46362747 @default.
• W1991269710 hasConceptScore W1991269710C49040817 @default.
• W1991269710 hasConceptScore W1991269710C71924100 @default.
• W1991269710 hasConceptScore W1991269710C90327742 @default.
• W1991269710 hasLocation W19912697101 @default.
• W1991269710 hasLocation W19912697102 @default.
• W1991269710 hasOpenAccess W1991269710 @default.
• W1991269710 hasPrimaryLocation W19912697101 @default.
• W1991269710 hasRelatedWork W1997787499 @default.
• W1991269710 hasRelatedWork W1998828696 @default.
• W1991269710 hasRelatedWork W1999498831 @default.
• W1991269710 hasRelatedWork W2003271514 @default.
• W1991269710 hasRelatedWork W2026440420 @default.
• W1991269710 hasRelatedWork W2056445660 @default.
• W1991269710 hasRelatedWork W2073433640 @default.
• W1991269710 hasRelatedWork W2080201576 @default.
• W1991269710 hasRelatedWork W2096189894 @default.
• W1991269710 hasRelatedWork W2100241264 @default.
• W1991269710 hasRelatedWork W2100745914 @default.
• W1991269710 hasRelatedWork W2103777215 @default.
• W1991269710 hasRelatedWork W2114433265 @default.
• W1991269710 hasRelatedWork W2129680722 @default.
• W1991269710 hasRelatedWork W2132796407 @default.
• W1991269710 hasRelatedWork W2140348302 @default.

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