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- W1991303900 abstract "Real-time spectroscopic ellipsometry with an ultraviolet-extended spectral range (1.5–6.5 eV) has been applied to investigate the sputter deposition of boron nitride (BN) thin films with high cubic content in terms of a two-layer optical model. In this model, the inner and outer layers represent sp2- and sp3-bonded BN (hBN and cBN), respectively. The thickness evolution of the two layers as well as their dielectric functions over the extended spectral range have been determined." @default.
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- W1991303900 date "2001-04-02" @default.
- W1991303900 modified "2023-09-24" @default.
- W1991303900 title "Ultraviolet-extended real-time spectroscopic ellipsometry for characterization of phase evolution in BN thin films" @default.
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- W1991303900 doi "https://doi.org/10.1063/1.1358367" @default.
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