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- W1991315478 abstract "Single-crystal ZnO films were grown on (0112)LiTaO 3 substrates by electron cyclotron resonance-assisted molecular beam epitaxy (ECR-assisted MBE). The film orientation differed with the ratio of oxygen to zinc. Under oxygen-rich conditions, (1120)ZnO films with the c -axis parallel to the substrate surface were epitaxially grown. To identify the polarity of ZnO films with the c -axis parallel to the surface, a method using sideways chemical etching was proposed. The polarity of ZnO films was different when the films were grown on the + plane or the - plane of (0112)LiTaO 3 substrates. The ZnO/LiTaO 3 substrates offer a high electromechanical coupling factor of the shear horizontal-type leaky surface acoustic wave (SH-type leaky SAW) propagating along the X -axis due to an additional contribution of the piezoelectric shear effect of ZnO." @default.
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- W1991315478 date "2000-06-01" @default.
- W1991315478 modified "2023-10-16" @default.
- W1991315478 title "ZnO Film Growth on (0112)LiTaO<sub>3</sub> by Electron Cyclotron Resonance-Assisted Molecular Beam Epitaxy and Determination of Its Polarity" @default.
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- W1991315478 doi "https://doi.org/10.1143/jjap.39.l534" @default.
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