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• W1991336438 abstract "A new local wet etching method for microstructuring glass substrates without using photolithographic masking is presented. By utilizing local acidification of fluoride solution by electrochemical water oxidation reaction on micrometer-sized Pt electrodes, fine grooves were formed in silicate glass substrates. The groove formation speed was increased with increase in potential applied to the Pt electrode and was dependent on the glass type (silica, borosilicate or soda-lime)." @default.
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• W1991336438 date "2008-10-07" @default.
• W1991336438 modified "2023-10-01" @default.
• W1991336438 title "Local wet etching of glasses by acidification utilizing electrochemistry" @default.
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• W1991336438 doi "https://doi.org/10.1088/0960-1317/18/11/115023" @default.
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