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• W1991413152 abstract "III-V Nitride based microcantilevers, with AlGaN/GaN heterostructure field effect transistor as the piezoresistive deflection transducer, have been investigated under steady state, transient, ac, and UV illuminated conditions and compared to theoretical calculations. The steady state transverse gauge factor (GFt) was found to be much larger than theoretical estimates and increased regularly with more negative gate bias. Transient GFt demonstrated opposite sign but similar gate bias dependence and was measured as high as ∼860. Measurements under ac biasing conditions and UV illumination resulted in a lower GFt of ∼13, which agrees with theoretical calculations owing to elimination of charge trapping effects." @default.
• W1991413152 created "2016-06-24" @default.
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• W1991413152 date "2011-11-07" @default.
• W1991413152 modified "2023-10-14" @default.
• W1991413152 title "III-V Nitride based piezoresistive microcantilever for sensing applications" @default.
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• W1991413152 doi "https://doi.org/10.1063/1.3657467" @default.
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