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- W1991423130 abstract "The substrate temperature dependence of the IR transmission spectra of buried silicon dioxide layers formed by high dose ion implantation (~1017) was investigated for an ion dose ranging from 1017 to 1018 ions/cm2 at 250°C of 16O+ at 100 keV energy. The IR spectra indicate that the silicon/silicon-dioxide/silicon can be obtained after thermal annealing treatment of the implanted sample for 10 mm in hydrogen ambient at 1100°C." @default.
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- W1991423130 date "1982-01-01" @default.
- W1991423130 modified "2023-09-23" @default.
- W1991423130 title "Optimisation of implantation conditions for the formation of buried SiO2 layers in silicon" @default.
- W1991423130 doi "https://doi.org/10.1049/el:19820147" @default.
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