Matches in SemOpenAlex for { <https://semopenalex.org/work/W1991475931> ?p ?o ?g. }
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- W1991475931 endingPage "312" @default.
- W1991475931 startingPage "309" @default.
- W1991475931 abstract "UV light-exited ozone has been applied for rapid low-temperature oxidation of silicon in a wafer-transfer type chamber. Oxidation was made in almost 100% ozone atmosphere with KrF excimer laser (248 nm) which enables the effective supply of O (1D) atoms to the processed surface. In this system, SiO2 film with a thickness of more than 3.5 nm is achieved even as low as 200°C. Uniform 2.9 nm film formation over 5-inch wafer with a thickness fluctuation of 0.1 nm was also obtained when KrF laser irradiation area was enlarged by a cylindrical concave lens. Current-voltage measurement has been employed to characterize SiO2 films and it is confirmed that the catastrophic breakdown field strength was 13 MV/cm. Processing pressure dependence of density of O (1D) atoms which contributing to the oxidation was estimated. Experimental result that the thickness of SiO2 film increases by decreasing the processing pressure agrees with our estimated result at the pressure range between 340 Pa and 820 Pa." @default.
- W1991475931 created "2016-06-24" @default.
- W1991475931 creator A5036580036 @default.
- W1991475931 creator A5062537434 @default.
- W1991475931 creator A5072108751 @default.
- W1991475931 creator A5087644292 @default.
- W1991475931 date "2005-01-01" @default.
- W1991475931 modified "2023-09-26" @default.
- W1991475931 title "Ultra-low Temperature Oxidation of Silicon using UV Light-exited Ozone in Wafer-transfer Type Chamber" @default.
- W1991475931 cites W125753325 @default.
- W1991475931 cites W1983543092 @default.
- W1991475931 cites W1985289544 @default.
- W1991475931 cites W1994100119 @default.
- W1991475931 cites W2000525842 @default.
- W1991475931 cites W2185590476 @default.
- W1991475931 cites W2587942778 @default.
- W1991475931 doi "https://doi.org/10.3131/jvsj.48.309" @default.
- W1991475931 hasPublicationYear "2005" @default.
- W1991475931 type Work @default.
- W1991475931 sameAs 1991475931 @default.
- W1991475931 citedByCount "5" @default.
- W1991475931 crossrefType "journal-article" @default.
- W1991475931 hasAuthorship W1991475931A5036580036 @default.
- W1991475931 hasAuthorship W1991475931A5062537434 @default.
- W1991475931 hasAuthorship W1991475931A5072108751 @default.
- W1991475931 hasAuthorship W1991475931A5087644292 @default.
- W1991475931 hasBestOaLocation W19914759311 @default.
- W1991475931 hasConcept C111337013 @default.
- W1991475931 hasConcept C111368507 @default.
- W1991475931 hasConcept C113196181 @default.
- W1991475931 hasConcept C120665830 @default.
- W1991475931 hasConcept C121332964 @default.
- W1991475931 hasConcept C127313418 @default.
- W1991475931 hasConcept C160671074 @default.
- W1991475931 hasConcept C178790620 @default.
- W1991475931 hasConcept C185544564 @default.
- W1991475931 hasConcept C185592680 @default.
- W1991475931 hasConcept C192562407 @default.
- W1991475931 hasConcept C200239111 @default.
- W1991475931 hasConcept C2780477314 @default.
- W1991475931 hasConcept C43617362 @default.
- W1991475931 hasConcept C49040817 @default.
- W1991475931 hasConcept C508106653 @default.
- W1991475931 hasConcept C520434653 @default.
- W1991475931 hasConcept C544956773 @default.
- W1991475931 hasConceptScore W1991475931C111337013 @default.
- W1991475931 hasConceptScore W1991475931C111368507 @default.
- W1991475931 hasConceptScore W1991475931C113196181 @default.
- W1991475931 hasConceptScore W1991475931C120665830 @default.
- W1991475931 hasConceptScore W1991475931C121332964 @default.
- W1991475931 hasConceptScore W1991475931C127313418 @default.
- W1991475931 hasConceptScore W1991475931C160671074 @default.
- W1991475931 hasConceptScore W1991475931C178790620 @default.
- W1991475931 hasConceptScore W1991475931C185544564 @default.
- W1991475931 hasConceptScore W1991475931C185592680 @default.
- W1991475931 hasConceptScore W1991475931C192562407 @default.
- W1991475931 hasConceptScore W1991475931C200239111 @default.
- W1991475931 hasConceptScore W1991475931C2780477314 @default.
- W1991475931 hasConceptScore W1991475931C43617362 @default.
- W1991475931 hasConceptScore W1991475931C49040817 @default.
- W1991475931 hasConceptScore W1991475931C508106653 @default.
- W1991475931 hasConceptScore W1991475931C520434653 @default.
- W1991475931 hasConceptScore W1991475931C544956773 @default.
- W1991475931 hasIssue "5" @default.
- W1991475931 hasLocation W19914759311 @default.
- W1991475931 hasOpenAccess W1991475931 @default.
- W1991475931 hasPrimaryLocation W19914759311 @default.
- W1991475931 hasRelatedWork W1542185001 @default.
- W1991475931 hasRelatedWork W1970831424 @default.
- W1991475931 hasRelatedWork W2081367125 @default.
- W1991475931 hasRelatedWork W2111385852 @default.
- W1991475931 hasRelatedWork W2313296748 @default.
- W1991475931 hasRelatedWork W2318078842 @default.
- W1991475931 hasRelatedWork W2546835089 @default.
- W1991475931 hasRelatedWork W2929732397 @default.
- W1991475931 hasRelatedWork W2997661267 @default.
- W1991475931 hasRelatedWork W3134027146 @default.
- W1991475931 hasVolume "48" @default.
- W1991475931 isParatext "false" @default.
- W1991475931 isRetracted "false" @default.
- W1991475931 magId "1991475931" @default.
- W1991475931 workType "article" @default.