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- W1991489737 abstract "Calculation technique has been worked out and distortion has been studied in ion optical systems with reduction wide-field image intended to Ion Projection Lithography. It is offered the refined definitions for distortion, fine structure of distortion picture, paraxial system, optimal regime of collimator tuning, which allows us to optimize conditions influencing on distortion value. The criterion of optimization is in maximum work field limited by given value of distortion. Three alternative calculation methods are employed in which third-order and fifth-order distortion is obtained. One is a new approach to the system having collimator and projector. Calculation of electric field is carried out by means of the method of integral equations with calculating derivatives of field functions on axis up to the fourth order which is necessary for fifth-order distortion calculation. Cases of distortion related to perturbation of axial symmetry and their correction and resting members are considered. Rigorous solution of differential equations and analysis of obtained results gives us picture of fine distortion structure with simultaneous presents intrinsic barrel-type and extrinsic pincushion-like areas separated by contour of null-value distortion which due to a deformation in result of presents the fourth-order distortion. Perturbation distortion has been increased in intrinsic area in spite of correction." @default.
- W1991489737 created "2016-06-24" @default.
- W1991489737 creator A5012089380 @default.
- W1991489737 creator A5049448645 @default.
- W1991489737 creator A5085430209 @default.
- W1991489737 date "1995-09-25" @default.
- W1991489737 modified "2023-09-23" @default.
- W1991489737 title "<title>Rigorous theoretical investigation of distortion in ion-projection noncathode systems</title>" @default.
- W1991489737 doi "https://doi.org/10.1117/12.221619" @default.
- W1991489737 hasPublicationYear "1995" @default.
- W1991489737 type Work @default.
- W1991489737 sameAs 1991489737 @default.
- W1991489737 citedByCount "0" @default.
- W1991489737 crossrefType "proceedings-article" @default.
- W1991489737 hasAuthorship W1991489737A5012089380 @default.
- W1991489737 hasAuthorship W1991489737A5049448645 @default.
- W1991489737 hasAuthorship W1991489737A5085430209 @default.
- W1991489737 hasConcept C120665830 @default.
- W1991489737 hasConcept C121332964 @default.
- W1991489737 hasConcept C126780896 @default.
- W1991489737 hasConcept C168834538 @default.
- W1991489737 hasConcept C194257627 @default.
- W1991489737 hasConcept C2776257435 @default.
- W1991489737 hasConcept C2776865275 @default.
- W1991489737 hasConcept C33923547 @default.
- W1991489737 hasConcept C41008148 @default.
- W1991489737 hasConcept C56034020 @default.
- W1991489737 hasConcept C76155785 @default.
- W1991489737 hasConceptScore W1991489737C120665830 @default.
- W1991489737 hasConceptScore W1991489737C121332964 @default.
- W1991489737 hasConceptScore W1991489737C126780896 @default.
- W1991489737 hasConceptScore W1991489737C168834538 @default.
- W1991489737 hasConceptScore W1991489737C194257627 @default.
- W1991489737 hasConceptScore W1991489737C2776257435 @default.
- W1991489737 hasConceptScore W1991489737C2776865275 @default.
- W1991489737 hasConceptScore W1991489737C33923547 @default.
- W1991489737 hasConceptScore W1991489737C41008148 @default.
- W1991489737 hasConceptScore W1991489737C56034020 @default.
- W1991489737 hasConceptScore W1991489737C76155785 @default.
- W1991489737 hasLocation W19914897371 @default.
- W1991489737 hasOpenAccess W1991489737 @default.
- W1991489737 hasPrimaryLocation W19914897371 @default.
- W1991489737 hasRelatedWork W2042812633 @default.
- W1991489737 hasRelatedWork W2052351552 @default.
- W1991489737 hasRelatedWork W2064990330 @default.
- W1991489737 hasRelatedWork W2111830442 @default.
- W1991489737 hasRelatedWork W2117548080 @default.
- W1991489737 hasRelatedWork W2139937060 @default.
- W1991489737 hasRelatedWork W2519558435 @default.
- W1991489737 hasRelatedWork W2519645468 @default.
- W1991489737 hasRelatedWork W2579568420 @default.
- W1991489737 hasRelatedWork W2948729387 @default.
- W1991489737 isParatext "false" @default.
- W1991489737 isRetracted "false" @default.
- W1991489737 magId "1991489737" @default.
- W1991489737 workType "article" @default.