Matches in SemOpenAlex for { <https://semopenalex.org/work/W1991513201> ?p ?o ?g. }
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with 100 items per page.
- W1991513201 endingPage "2791" @default.
- W1991513201 startingPage "2785" @default.
- W1991513201 abstract "Abstract An apparatus and a characterization technique have been developed at the ESRF beamline BM5 to investigate in‐situ the evolution of the morphology of a film using grazing incidence X‐ray reflectometry. The instrument is capable of measuring in‐situ and in real time the X‐ray intensity specularly and diffusely scattered from a rough thin film during various surfacing processes. The variation of the specular intensity as a function of the processing time, recorded simultaneously with each X‐ray scattering diagram, is analyzed to infer the film growth rate, the film density and the variation of roughness conformity during surface processing. The potential of the method is demonstrated for two particular cases: thin film deposition by magnetron sputtering and subsequent film etching by low energy ion bombardment. The paper describes some recent achievements and present examples of on‐line diagnostics for which real time in‐situ X‐rays reflectometry proves to be a unique probe. (© 2007 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)" @default.
- W1991513201 created "2016-06-24" @default.
- W1991513201 creator A5045359700 @default.
- W1991513201 creator A5058804882 @default.
- W1991513201 creator A5072020301 @default.
- W1991513201 date "2007-07-31" @default.
- W1991513201 modified "2023-09-23" @default.
- W1991513201 title "Real-time X-ray reflectometry during thin-film processing" @default.
- W1991513201 cites W2001288208 @default.
- W1991513201 cites W2020501004 @default.
- W1991513201 cites W2025387945 @default.
- W1991513201 cites W2025402929 @default.
- W1991513201 cites W2032124367 @default.
- W1991513201 cites W2040480857 @default.
- W1991513201 cites W2076816345 @default.
- W1991513201 doi "https://doi.org/10.1002/pssa.200675665" @default.
- W1991513201 hasPublicationYear "2007" @default.
- W1991513201 type Work @default.
- W1991513201 sameAs 1991513201 @default.
- W1991513201 citedByCount "6" @default.
- W1991513201 countsByYear W19915132012012 @default.
- W1991513201 countsByYear W19915132012017 @default.
- W1991513201 countsByYear W19915132012018 @default.
- W1991513201 crossrefType "journal-article" @default.
- W1991513201 hasAuthorship W1991513201A5045359700 @default.
- W1991513201 hasAuthorship W1991513201A5058804882 @default.
- W1991513201 hasAuthorship W1991513201A5072020301 @default.
- W1991513201 hasConcept C100460472 @default.
- W1991513201 hasConcept C103824480 @default.
- W1991513201 hasConcept C118381688 @default.
- W1991513201 hasConcept C120665830 @default.
- W1991513201 hasConcept C121332964 @default.
- W1991513201 hasConcept C136959337 @default.
- W1991513201 hasConcept C159985019 @default.
- W1991513201 hasConcept C168834538 @default.
- W1991513201 hasConcept C171250308 @default.
- W1991513201 hasConcept C19067145 @default.
- W1991513201 hasConcept C191486275 @default.
- W1991513201 hasConcept C192562407 @default.
- W1991513201 hasConcept C22423302 @default.
- W1991513201 hasConcept C2778925768 @default.
- W1991513201 hasConcept C2779227376 @default.
- W1991513201 hasConcept C31972630 @default.
- W1991513201 hasConcept C41008148 @default.
- W1991513201 hasConcept C55148256 @default.
- W1991513201 hasConcept C61427134 @default.
- W1991513201 hasConcept C71039073 @default.
- W1991513201 hasConceptScore W1991513201C100460472 @default.
- W1991513201 hasConceptScore W1991513201C103824480 @default.
- W1991513201 hasConceptScore W1991513201C118381688 @default.
- W1991513201 hasConceptScore W1991513201C120665830 @default.
- W1991513201 hasConceptScore W1991513201C121332964 @default.
- W1991513201 hasConceptScore W1991513201C136959337 @default.
- W1991513201 hasConceptScore W1991513201C159985019 @default.
- W1991513201 hasConceptScore W1991513201C168834538 @default.
- W1991513201 hasConceptScore W1991513201C171250308 @default.
- W1991513201 hasConceptScore W1991513201C19067145 @default.
- W1991513201 hasConceptScore W1991513201C191486275 @default.
- W1991513201 hasConceptScore W1991513201C192562407 @default.
- W1991513201 hasConceptScore W1991513201C22423302 @default.
- W1991513201 hasConceptScore W1991513201C2778925768 @default.
- W1991513201 hasConceptScore W1991513201C2779227376 @default.
- W1991513201 hasConceptScore W1991513201C31972630 @default.
- W1991513201 hasConceptScore W1991513201C41008148 @default.
- W1991513201 hasConceptScore W1991513201C55148256 @default.
- W1991513201 hasConceptScore W1991513201C61427134 @default.
- W1991513201 hasConceptScore W1991513201C71039073 @default.
- W1991513201 hasIssue "8" @default.
- W1991513201 hasLocation W19915132011 @default.
- W1991513201 hasOpenAccess W1991513201 @default.
- W1991513201 hasPrimaryLocation W19915132011 @default.
- W1991513201 hasRelatedWork W1644662409 @default.
- W1991513201 hasRelatedWork W1966826052 @default.
- W1991513201 hasRelatedWork W1991513201 @default.
- W1991513201 hasRelatedWork W2000894756 @default.
- W1991513201 hasRelatedWork W2017223873 @default.
- W1991513201 hasRelatedWork W2043052908 @default.
- W1991513201 hasRelatedWork W2049742303 @default.
- W1991513201 hasRelatedWork W2057495550 @default.
- W1991513201 hasRelatedWork W2065834018 @default.
- W1991513201 hasRelatedWork W2077584561 @default.
- W1991513201 hasVolume "204" @default.
- W1991513201 isParatext "false" @default.
- W1991513201 isRetracted "false" @default.
- W1991513201 magId "1991513201" @default.
- W1991513201 workType "article" @default.