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• W1991539543 endingPage "441" @default.
• W1991539543 startingPage "437" @default.
• W1991539543 abstract "For obtaining excellent epitaxial wafers with low sheet resistance and smooth surface, which are essential for higher power AlGaN/GaN high electron mobility transistor (HEMT), we adopted the combination of GaN/AIN-superlattic (SL) quasi-AlGaN alloy barrier, whose preparation is more suitable for MBE technique, and precisely-controlled vicinal substrates of SiC. It was found that the crystalline quality of the GaN channel layer was improved due to the vicinal substrates with the vicinal angle up to 2∘. Furthermore, by the effect of SL quasi alloy barrier, the surface of the HEMT structures exhibited step flow feature with the rms of the surface roughness 0.31 nm, although the equivalent composition of the SL quasi alloy barrier was as high as 0.5. In consequence of the improvement of the crystalline quality and the high Al content, the sheet resistance of 320Ω/□ was obtained." @default.
• W1991539543 created "2016-06-24" @default.
• W1991539543 creator A5024527873 @default.
• W1991539543 creator A5034104434 @default.
• W1991539543 creator A5035849354 @default.
• W1991539543 creator A5041488722 @default.
• W1991539543 creator A5061235344 @default.
• W1991539543 creator A5074927744 @default.
• W1991539543 creator A5081108520 @default.
• W1991539543 date "2007-04-01" @default.
• W1991539543 modified "2023-10-18" @default.
• W1991539543 title "Growth of GaN-HEMT structures using super lattice quasi-AlGaN alloy barriers on vicinal SiC substrates by rf-MBE" @default.
• W1991539543 cites W1881890754 @default.
• W1991539543 cites W1963640329 @default.
• W1991539543 cites W1976589490 @default.
• W1991539543 cites W1996002120 @default.
• W1991539543 cites W2002202031 @default.
• W1991539543 cites W2018770598 @default.
• W1991539543 cites W2039175191 @default.
• W1991539543 cites W2039319557 @default.
• W1991539543 cites W2043636680 @default.
• W1991539543 cites W2044583065 @default.
• W1991539543 cites W2050487076 @default.
• W1991539543 cites W2055933050 @default.
• W1991539543 cites W2078978163 @default.
• W1991539543 cites W2079139115 @default.
• W1991539543 cites W2079891503 @default.
• W1991539543 cites W2086427181 @default.
• W1991539543 cites W2088120384 @default.
• W1991539543 cites W2093227740 @default.
• W1991539543 cites W2093744839 @default.
• W1991539543 doi "https://doi.org/10.1016/j.jcrysgro.2006.11.297" @default.
• W1991539543 hasPublicationYear "2007" @default.
• W1991539543 type Work @default.
• W1991539543 sameAs 1991539543 @default.
• W1991539543 citedByCount "3" @default.
• W1991539543 countsByYear W19915395432022 @default.
• W1991539543 crossrefType "journal-article" @default.
• W1991539543 hasAuthorship W1991539543A5024527873 @default.
• W1991539543 hasAuthorship W1991539543A5034104434 @default.
• W1991539543 hasAuthorship W1991539543A5035849354 @default.
• W1991539543 hasAuthorship W1991539543A5041488722 @default.
• W1991539543 hasAuthorship W1991539543A5061235344 @default.
• W1991539543 hasAuthorship W1991539543A5074927744 @default.
• W1991539543 hasAuthorship W1991539543A5081108520 @default.
• W1991539543 hasConcept C107365816 @default.
• W1991539543 hasConcept C110738630 @default.
• W1991539543 hasConcept C119599485 @default.
• W1991539543 hasConcept C121349320 @default.
• W1991539543 hasConcept C127413603 @default.
• W1991539543 hasConcept C159985019 @default.
• W1991539543 hasConcept C160671074 @default.
• W1991539543 hasConcept C162057924 @default.
• W1991539543 hasConcept C165801399 @default.
• W1991539543 hasConcept C171250308 @default.
• W1991539543 hasConcept C172385210 @default.
• W1991539543 hasConcept C178790620 @default.
• W1991539543 hasConcept C185592680 @default.
• W1991539543 hasConcept C192562407 @default.
• W1991539543 hasConcept C2779227376 @default.
• W1991539543 hasConcept C2779833192 @default.
• W1991539543 hasConcept C2780026712 @default.
• W1991539543 hasConcept C3792809 @default.
• W1991539543 hasConcept C49040817 @default.
• W1991539543 hasConcept C66825105 @default.
• W1991539543 hasConceptScore W1991539543C107365816 @default.
• W1991539543 hasConceptScore W1991539543C110738630 @default.
• W1991539543 hasConceptScore W1991539543C119599485 @default.
• W1991539543 hasConceptScore W1991539543C121349320 @default.
• W1991539543 hasConceptScore W1991539543C127413603 @default.
• W1991539543 hasConceptScore W1991539543C159985019 @default.
• W1991539543 hasConceptScore W1991539543C160671074 @default.
• W1991539543 hasConceptScore W1991539543C162057924 @default.
• W1991539543 hasConceptScore W1991539543C165801399 @default.
• W1991539543 hasConceptScore W1991539543C171250308 @default.
• W1991539543 hasConceptScore W1991539543C172385210 @default.
• W1991539543 hasConceptScore W1991539543C178790620 @default.
• W1991539543 hasConceptScore W1991539543C185592680 @default.
• W1991539543 hasConceptScore W1991539543C192562407 @default.
• W1991539543 hasConceptScore W1991539543C2779227376 @default.
• W1991539543 hasConceptScore W1991539543C2779833192 @default.
• W1991539543 hasConceptScore W1991539543C2780026712 @default.
• W1991539543 hasConceptScore W1991539543C3792809 @default.
• W1991539543 hasConceptScore W1991539543C49040817 @default.
• W1991539543 hasConceptScore W1991539543C66825105 @default.
• W1991539543 hasLocation W19915395431 @default.
• W1991539543 hasOpenAccess W1991539543 @default.
• W1991539543 hasPrimaryLocation W19915395431 @default.
• W1991539543 hasRelatedWork W1501442580 @default.
• W1991539543 hasRelatedWork W1974367901 @default.
• W1991539543 hasRelatedWork W1975574136 @default.
• W1991539543 hasRelatedWork W1991539543 @default.
• W1991539543 hasRelatedWork W2009964935 @default.
• W1991539543 hasRelatedWork W2019827160 @default.
• W1991539543 hasRelatedWork W2071053426 @default.
• W1991539543 hasRelatedWork W2159652192 @default.
• W1991539543 hasRelatedWork W2533699557 @default.
• W1991539543 hasRelatedWork W4383501986 @default.

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