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Matches in SemOpenAlex for { <https://semopenalex.org/work/W1991639068> ?p ?o ?g. }

• W1991639068 endingPage "220" @default.
• W1991639068 startingPage "213" @default.
• W1991639068 abstract "In this study, the effect of the cutting edge radius on a machined surface and subsurface in the nanoscale ductile mode cutting of silicon wafer is investigated through cutting tests using tools with edge radii ranging from 23 nm to 807 nm. The machined surface is examined using SEM, AFM, and Formtracer, with an etching technique used for SEM observation. The results show that if the cutting edge radius does not exceed a certain upper bound value, and the undeformed chip thickness is less than the cutting edge radius, it is possible to achieve both a surface and a subsurface free of cracks. Based on the molecular dynamics simulation of the nanoscale ductile mode cutting process of monocrystalline silicon wafer, it is found that the critical upper bound for the cutting edge radius in the ductile mode chip formation relates to the stress condition in the cutting region. The shear stress decreases as the tool edge radius is increased. As the cutting edge radius increases beyond the limit, the insufficient shear stress will cause both surface and subsurface damage on the machined workpiece. For the cutting of silicon under the same conditions, the limit for the cutting edge radius was found to be about 807 nm." @default.
• W1991639068 created "2016-06-24" @default.
• W1991639068 creator A5034806491 @default.
• W1991639068 creator A5035225854 @default.
• W1991639068 creator A5046755546 @default.
• W1991639068 creator A5053240248 @default.
• W1991639068 creator A5061915592 @default.
• W1991639068 creator A5077237719 @default.
• W1991639068 date "2007-02-01" @default.
• W1991639068 modified "2023-09-27" @default.
• W1991639068 title "The Effect of the Cutting Edge Radius on a Machined Surface in the Nanoscale Ductile Mode Cutting of Silicon Wafer" @default.
• W1991639068 cites W1965048893 @default.
• W1991639068 cites W1969648354 @default.
• W1991639068 cites W1977982563 @default.
• W1991639068 cites W2012039513 @default.
• W1991639068 cites W2014192316 @default.
• W1991639068 cites W2018090894 @default.
• W1991639068 cites W2029227760 @default.
• W1991639068 cites W2033185496 @default.
• W1991639068 cites W2034240379 @default.
• W1991639068 cites W2043073417 @default.
• W1991639068 cites W2048406884 @default.
• W1991639068 cites W2049544806 @default.
• W1991639068 cites W2073300143 @default.
• W1991639068 cites W2074681711 @default.
• W1991639068 doi "https://doi.org/10.1243/09544054jem568" @default.
• W1991639068 hasPublicationYear "2007" @default.
• W1991639068 type Work @default.
• W1991639068 sameAs 1991639068 @default.
• W1991639068 citedByCount "36" @default.
• W1991639068 countsByYear W19916390682012 @default.
• W1991639068 countsByYear W19916390682013 @default.
• W1991639068 countsByYear W19916390682014 @default.
• W1991639068 countsByYear W19916390682015 @default.
• W1991639068 countsByYear W19916390682016 @default.
• W1991639068 countsByYear W19916390682017 @default.
• W1991639068 countsByYear W19916390682018 @default.
• W1991639068 countsByYear W19916390682020 @default.
• W1991639068 countsByYear W19916390682021 @default.
• W1991639068 countsByYear W19916390682022 @default.
• W1991639068 countsByYear W19916390682023 @default.
• W1991639068 crossrefType "journal-article" @default.
• W1991639068 hasAuthorship W1991639068A5034806491 @default.
• W1991639068 hasAuthorship W1991639068A5035225854 @default.
• W1991639068 hasAuthorship W1991639068A5046755546 @default.
• W1991639068 hasAuthorship W1991639068A5053240248 @default.
• W1991639068 hasAuthorship W1991639068A5061915592 @default.
• W1991639068 hasAuthorship W1991639068A5077237719 @default.
• W1991639068 hasConcept C100460472 @default.
• W1991639068 hasConcept C159985019 @default.
• W1991639068 hasConcept C160671074 @default.
• W1991639068 hasConcept C162307627 @default.
• W1991639068 hasConcept C171250308 @default.
• W1991639068 hasConcept C178635117 @default.
• W1991639068 hasConcept C191897082 @default.
• W1991639068 hasConcept C192562407 @default.
• W1991639068 hasConcept C21141959 @default.
• W1991639068 hasConcept C26953177 @default.
• W1991639068 hasConcept C2779227376 @default.
• W1991639068 hasConcept C38652104 @default.
• W1991639068 hasConcept C41008148 @default.
• W1991639068 hasConcept C45206210 @default.
• W1991639068 hasConcept C49040817 @default.
• W1991639068 hasConcept C544956773 @default.
• W1991639068 hasConcept C76155785 @default.
• W1991639068 hasConceptScore W1991639068C100460472 @default.
• W1991639068 hasConceptScore W1991639068C159985019 @default.
• W1991639068 hasConceptScore W1991639068C160671074 @default.
• W1991639068 hasConceptScore W1991639068C162307627 @default.
• W1991639068 hasConceptScore W1991639068C171250308 @default.
• W1991639068 hasConceptScore W1991639068C178635117 @default.
• W1991639068 hasConceptScore W1991639068C191897082 @default.
• W1991639068 hasConceptScore W1991639068C192562407 @default.
• W1991639068 hasConceptScore W1991639068C21141959 @default.
• W1991639068 hasConceptScore W1991639068C26953177 @default.
• W1991639068 hasConceptScore W1991639068C2779227376 @default.
• W1991639068 hasConceptScore W1991639068C38652104 @default.
• W1991639068 hasConceptScore W1991639068C41008148 @default.
• W1991639068 hasConceptScore W1991639068C45206210 @default.
• W1991639068 hasConceptScore W1991639068C49040817 @default.
• W1991639068 hasConceptScore W1991639068C544956773 @default.
• W1991639068 hasConceptScore W1991639068C76155785 @default.
• W1991639068 hasIssue "2" @default.
• W1991639068 hasLocation W19916390681 @default.
• W1991639068 hasOpenAccess W1991639068 @default.
• W1991639068 hasPrimaryLocation W19916390681 @default.
• W1991639068 hasRelatedWork W1502290463 @default.
• W1991639068 hasRelatedWork W2004589872 @default.
• W1991639068 hasRelatedWork W2032296492 @default.
• W1991639068 hasRelatedWork W23218324 @default.
• W1991639068 hasRelatedWork W2902087874 @default.
• W1991639068 hasRelatedWork W2970050376 @default.
• W1991639068 hasRelatedWork W3021296256 @default.
• W1991639068 hasRelatedWork W3145205962 @default.
• W1991639068 hasRelatedWork W3199334758 @default.
• W1991639068 hasRelatedWork W3216182416 @default.
• W1991639068 hasVolume "221" @default.
• W1991639068 isParatext "false" @default.

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