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- W1991666588 abstract "We have built a freestanding cleanroom module for microsystem testing. The environment has an interior floor space of 4.3 m × 2.1 m and a ceiling of 2.4 m (8 feet). The cleanroom module can be operated as a class 10 000 environment, and the cost of materials was less than CDN$1900. In this paper, we describe the construction and testing of our cleanroom module." @default.
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- W1991666588 date "2007-06-29" @default.
- W1991666588 modified "2023-09-23" @default.
- W1991666588 title "Fabrication of an inexpensive cleanroom module for microsystem testing" @default.
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- W1991666588 doi "https://doi.org/10.1088/0960-1317/17/8/n01" @default.
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