FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W1991716771> ?p ?o ?g. }

• W1991716771 endingPage "7" @default.
• W1991716771 startingPage "3" @default.
• W1991716771 abstract "Abstract The effect of the negative oxygen ions in direct current magnetron sputtering on the thin film deposition is investigated with a two-dimensional particle-in-cell simulation with the variation of argon gas pressure ranging from 1.33 to 6.67 Pa (10 to 50 mTorr). While the plasma density increases with the increase of gas pressure, the total amount of the negative oxygen ions emitted from the target surface does not change significantly with respect to the gas pressure. The amount of high energy O − ions having small incident angles on the substrate decreases with increasing gas pressure especially at the target erosion region. On the contrary, the amount of low energy O − ions having large incident angles on the substrate increases with increasing gas pressure especially at the center region. The tendency for the change of spatial resistivity of ZnO thin films with respect to gas pressure can be explained with the simulation results." @default.
• W1991716771 created "2016-06-24" @default.
• W1991716771 creator A5030998316 @default.
• W1991716771 creator A5039501026 @default.
• W1991716771 creator A5088824120 @default.
• W1991716771 date "2015-07-01" @default.
• W1991716771 modified "2023-09-29" @default.
• W1991716771 title "The effect of negative ions from the target on thin film deposition in a direct current magnetron sputtering system" @default.
• W1991716771 cites W1977284103 @default.
• W1991716771 cites W1980412805 @default.
• W1991716771 cites W1986971136 @default.
• W1991716771 cites W2000279215 @default.
• W1991716771 cites W2044611744 @default.
• W1991716771 cites W2048338165 @default.
• W1991716771 cites W2056109291 @default.
• W1991716771 cites W2073793879 @default.
• W1991716771 cites W2083634643 @default.
• W1991716771 cites W2084487314 @default.
• W1991716771 cites W2118373239 @default.
• W1991716771 cites W2162794135 @default.
• W1991716771 cites W4211017979 @default.
• W1991716771 cites W4230053467 @default.
• W1991716771 doi "https://doi.org/10.1016/j.tsf.2015.03.019" @default.
• W1991716771 hasPublicationYear "2015" @default.
• W1991716771 type Work @default.
• W1991716771 sameAs 1991716771 @default.
• W1991716771 citedByCount "5" @default.
• W1991716771 countsByYear W19917167712016 @default.
• W1991716771 countsByYear W19917167712018 @default.
• W1991716771 countsByYear W19917167712020 @default.
• W1991716771 countsByYear W19917167712023 @default.
• W1991716771 crossrefType "journal-article" @default.
• W1991716771 hasAuthorship W1991716771A5030998316 @default.
• W1991716771 hasAuthorship W1991716771A5039501026 @default.
• W1991716771 hasAuthorship W1991716771A5088824120 @default.
• W1991716771 hasConcept C107872376 @default.
• W1991716771 hasConcept C113196181 @default.
• W1991716771 hasConcept C118442862 @default.
• W1991716771 hasConcept C119599485 @default.
• W1991716771 hasConcept C123408415 @default.
• W1991716771 hasConcept C127313418 @default.
• W1991716771 hasConcept C127413603 @default.
• W1991716771 hasConcept C145148216 @default.
• W1991716771 hasConcept C148043351 @default.
• W1991716771 hasConcept C151730666 @default.
• W1991716771 hasConcept C165801399 @default.
• W1991716771 hasConcept C171250308 @default.
• W1991716771 hasConcept C178790620 @default.
• W1991716771 hasConcept C185592680 @default.
• W1991716771 hasConcept C19067145 @default.
• W1991716771 hasConcept C192562407 @default.
• W1991716771 hasConcept C22423302 @default.
• W1991716771 hasConcept C2776620479 @default.
• W1991716771 hasConcept C2816523 @default.
• W1991716771 hasConcept C49040817 @default.
• W1991716771 hasConcept C61427134 @default.
• W1991716771 hasConcept C64297162 @default.
• W1991716771 hasConcept C97892325 @default.
• W1991716771 hasConceptScore W1991716771C107872376 @default.
• W1991716771 hasConceptScore W1991716771C113196181 @default.
• W1991716771 hasConceptScore W1991716771C118442862 @default.
• W1991716771 hasConceptScore W1991716771C119599485 @default.
• W1991716771 hasConceptScore W1991716771C123408415 @default.
• W1991716771 hasConceptScore W1991716771C127313418 @default.
• W1991716771 hasConceptScore W1991716771C127413603 @default.
• W1991716771 hasConceptScore W1991716771C145148216 @default.
• W1991716771 hasConceptScore W1991716771C148043351 @default.
• W1991716771 hasConceptScore W1991716771C151730666 @default.
• W1991716771 hasConceptScore W1991716771C165801399 @default.
• W1991716771 hasConceptScore W1991716771C171250308 @default.
• W1991716771 hasConceptScore W1991716771C178790620 @default.
• W1991716771 hasConceptScore W1991716771C185592680 @default.
• W1991716771 hasConceptScore W1991716771C19067145 @default.
• W1991716771 hasConceptScore W1991716771C192562407 @default.
• W1991716771 hasConceptScore W1991716771C22423302 @default.
• W1991716771 hasConceptScore W1991716771C2776620479 @default.
• W1991716771 hasConceptScore W1991716771C2816523 @default.
• W1991716771 hasConceptScore W1991716771C49040817 @default.
• W1991716771 hasConceptScore W1991716771C61427134 @default.
• W1991716771 hasConceptScore W1991716771C64297162 @default.
• W1991716771 hasConceptScore W1991716771C97892325 @default.
• W1991716771 hasLocation W19917167711 @default.
• W1991716771 hasOpenAccess W1991716771 @default.
• W1991716771 hasPrimaryLocation W19917167711 @default.
• W1991716771 hasRelatedWork W189174387 @default.
• W1991716771 hasRelatedWork W1968373997 @default.
• W1991716771 hasRelatedWork W1989928847 @default.
• W1991716771 hasRelatedWork W2019423004 @default.
• W1991716771 hasRelatedWork W2030970608 @default.
• W1991716771 hasRelatedWork W2077118741 @default.
• W1991716771 hasRelatedWork W2356622808 @default.
• W1991716771 hasRelatedWork W2367979151 @default.
• W1991716771 hasRelatedWork W2387657166 @default.
• W1991716771 hasRelatedWork W2393308622 @default.
• W1991716771 hasVolume "587" @default.
• W1991716771 isParatext "false" @default.
• W1991716771 isRetracted "false" @default.
• W1991716771 magId "1991716771" @default.

• next