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• W1991799093 endingPage "162" @default.
• W1991799093 startingPage "153" @default.
• W1991799093 abstract "Metal-insulator-metal (MIM) structures with ultrahigh-k strontium titanate films (SrTiO 3, STO) and Pt as the dielectric and electrode material, respectively, have been prepared by ALD. The MIM structures were prepared with near-stoichiometric and Sr-rich ([Sr]/([Sr]+[Ti]) = 0.54 and 0.63, respectively) with a thickness of 15 nm. The influence of the rapid thermal annealing step at 600 °C in flowing N 2 , required to crystallize the STO, on the crystalline microstructure of the Pt bottom electrode and of the STO films has been investigated. Transmission electron microscopy and electron diffraction analysis evidenced that the morphology of the Pt bottom electrode is influenced by thermal treatment. Locally, an epitaxial relation between the <111> textured Pt and the STO film could be found. However, X-ray and electron diffraction analysis showed that the STO crystalline grains were mainly randomly oriented. Top view TEM analysis revealed that the near-stoichiometric STO thin films deposited on Pt have a crystallization behavior comparable to those deposited on Al 2 O 3 , with nano-crack formation at the grain boundaries and an average grain size of ~ 100 nm." @default.
• W1991799093 created "2016-06-24" @default.
• W1991799093 creator A5030039866 @default.
• W1991799093 creator A5048719407 @default.
• W1991799093 creator A5058463930 @default.
• W1991799093 creator A5062932635 @default.
• W1991799093 date "2013-08-31" @default.
• W1991799093 modified "2023-09-27" @default.
• W1991799093 title "ALD of SrTiO3 and Pt for Pt/SrTiO3/Pt MIM Structures: Growth and Crystallization Study" @default.
• W1991799093 doi "https://doi.org/10.1149/05810.0153ecst" @default.
• W1991799093 hasPublicationYear "2013" @default.
• W1991799093 type Work @default.
• W1991799093 sameAs 1991799093 @default.
• W1991799093 citedByCount "3" @default.
• W1991799093 countsByYear W19917990932014 @default.
• W1991799093 countsByYear W19917990932018 @default.
• W1991799093 countsByYear W19917990932020 @default.
• W1991799093 crossrefType "journal-article" @default.
• W1991799093 hasAuthorship W1991799093A5030039866 @default.
• W1991799093 hasAuthorship W1991799093A5048719407 @default.
• W1991799093 hasAuthorship W1991799093A5058463930 @default.
• W1991799093 hasAuthorship W1991799093A5062932635 @default.
• W1991799093 hasConcept C110738630 @default.
• W1991799093 hasConcept C113196181 @default.
• W1991799093 hasConcept C120665830 @default.
• W1991799093 hasConcept C121332964 @default.
• W1991799093 hasConcept C127413603 @default.
• W1991799093 hasConcept C133386390 @default.
• W1991799093 hasConcept C144082473 @default.
• W1991799093 hasConcept C146088050 @default.
• W1991799093 hasConcept C159985019 @default.
• W1991799093 hasConcept C161790260 @default.
• W1991799093 hasConcept C171250308 @default.
• W1991799093 hasConcept C178790620 @default.
• W1991799093 hasConcept C185592680 @default.
• W1991799093 hasConcept C19067145 @default.
• W1991799093 hasConcept C192562407 @default.
• W1991799093 hasConcept C199289684 @default.
• W1991799093 hasConcept C203036418 @default.
• W1991799093 hasConcept C207114421 @default.
• W1991799093 hasConcept C26771246 @default.
• W1991799093 hasConcept C2777855556 @default.
• W1991799093 hasConcept C2779227376 @default.
• W1991799093 hasConcept C2781063764 @default.
• W1991799093 hasConcept C42360764 @default.
• W1991799093 hasConcept C43617362 @default.
• W1991799093 hasConcept C49040817 @default.
• W1991799093 hasConcept C518104683 @default.
• W1991799093 hasConcept C55493867 @default.
• W1991799093 hasConcept C77557913 @default.
• W1991799093 hasConcept C8010536 @default.
• W1991799093 hasConcept C87976508 @default.
• W1991799093 hasConcept C98390173 @default.
• W1991799093 hasConceptScore W1991799093C110738630 @default.
• W1991799093 hasConceptScore W1991799093C113196181 @default.
• W1991799093 hasConceptScore W1991799093C120665830 @default.
• W1991799093 hasConceptScore W1991799093C121332964 @default.
• W1991799093 hasConceptScore W1991799093C127413603 @default.
• W1991799093 hasConceptScore W1991799093C133386390 @default.
• W1991799093 hasConceptScore W1991799093C144082473 @default.
• W1991799093 hasConceptScore W1991799093C146088050 @default.
• W1991799093 hasConceptScore W1991799093C159985019 @default.
• W1991799093 hasConceptScore W1991799093C161790260 @default.
• W1991799093 hasConceptScore W1991799093C171250308 @default.
• W1991799093 hasConceptScore W1991799093C178790620 @default.
• W1991799093 hasConceptScore W1991799093C185592680 @default.
• W1991799093 hasConceptScore W1991799093C19067145 @default.
• W1991799093 hasConceptScore W1991799093C192562407 @default.
• W1991799093 hasConceptScore W1991799093C199289684 @default.
• W1991799093 hasConceptScore W1991799093C203036418 @default.
• W1991799093 hasConceptScore W1991799093C207114421 @default.
• W1991799093 hasConceptScore W1991799093C26771246 @default.
• W1991799093 hasConceptScore W1991799093C2777855556 @default.
• W1991799093 hasConceptScore W1991799093C2779227376 @default.
• W1991799093 hasConceptScore W1991799093C2781063764 @default.
• W1991799093 hasConceptScore W1991799093C42360764 @default.
• W1991799093 hasConceptScore W1991799093C43617362 @default.
• W1991799093 hasConceptScore W1991799093C49040817 @default.
• W1991799093 hasConceptScore W1991799093C518104683 @default.
• W1991799093 hasConceptScore W1991799093C55493867 @default.
• W1991799093 hasConceptScore W1991799093C77557913 @default.
• W1991799093 hasConceptScore W1991799093C8010536 @default.
• W1991799093 hasConceptScore W1991799093C87976508 @default.
• W1991799093 hasConceptScore W1991799093C98390173 @default.
• W1991799093 hasIssue "10" @default.
• W1991799093 hasLocation W19917990931 @default.
• W1991799093 hasOpenAccess W1991799093 @default.
• W1991799093 hasPrimaryLocation W19917990931 @default.
• W1991799093 hasRelatedWork W2003627770 @default.
• W1991799093 hasRelatedWork W2020349643 @default.
• W1991799093 hasRelatedWork W2026316910 @default.
• W1991799093 hasRelatedWork W2042350640 @default.
• W1991799093 hasRelatedWork W2052886173 @default.
• W1991799093 hasRelatedWork W2063210167 @default.
• W1991799093 hasRelatedWork W2068113961 @default.
• W1991799093 hasRelatedWork W2069771944 @default.
• W1991799093 hasRelatedWork W2079538184 @default.
• W1991799093 hasRelatedWork W2373262392 @default.

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