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- W1991863516 abstract "In this paper, we examine the physical properties of NiSi/p-Si implanted with various combinations of aluminum (Al) and sulfur (S) doses for Schottky barrier tuning. Techniques used included HRTEM, TOF-SIMS, HAADF STEM, and EDX. We also measured the integral interfacial dose (IID) of Al and S, i.e. amount of Al and S found with 2.5 nm of the interface, and correlated it to the Schottky barrier height (SBH). For the split with the same Al and S implant dose, the SBH tuning effect of Al overwhelms that of S and the extracted SBH is 0.137 eV." @default.
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- W1991863516 date "2010-11-01" @default.
- W1991863516 modified "2023-09-25" @default.
- W1991863516 title "Schottky barrier tuning at NiSi/Si interface using pre-silicide aluminum and sulfur co-implant" @default.
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- W1991863516 doi "https://doi.org/10.1109/icsict.2010.5667527" @default.
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