Matches in SemOpenAlex for { <https://semopenalex.org/work/W1991885087> ?p ?o ?g. }
Showing items 1 to 92 of
92
with 100 items per page.
- W1991885087 endingPage "159" @default.
- W1991885087 startingPage "154" @default.
- W1991885087 abstract "Highly photoluminescent SiNx films were in situ-deposited at low temperatures using a slot-antenna electron-cyclotron-resonance (SLAN ECR) plasma. Spectroscopic ellipsometry, photoluminescence (PL) spectroscopy, high-resolution transmission electron microscopy (HRTEM), and UV–vis–NIR spectroscopy measurements were used to characterize the film. The SLAN ECR plasma, the ionization rate of which exceeds that of an RF plasma and a plasma density of approximately 1010–1011 cm−3, is useful for high-quality film deposition at low temperatures. The deposited SiNx film displayed a high PL intensity, and as the SiH4/N2 ratio increased, the PL peak energy shifted from 2.8 to 1.7 eV. These characteristics are useful for fabricating optoelectronic devices, such as LEDs and solar cells. As the silicon content in the SiNx film increased, the PL FWHM decreased. This effect deviated from the predictions based on the quantum confinement effect. The quantum dots did not properly form, as confirmed based on the HRTEM image. The linear relationship between the PL peak energy and the optical band gap energy suggested that bandtail recombination offered a more appropriate description of the PL mechanism than quantum confinement effects. Annealing and hyper-thermal neutral beam (HNB) treatment did not produce a shift in the PL peak, although the PL intensity decreased. These results also support the bandtail recombination model." @default.
- W1991885087 created "2016-06-24" @default.
- W1991885087 creator A5042039192 @default.
- W1991885087 creator A5084426605 @default.
- W1991885087 date "2015-05-01" @default.
- W1991885087 modified "2023-09-27" @default.
- W1991885087 title "Highly photoluminescent low-temperature SiNx films in situ-deposited via SLAN ECR PECVD" @default.
- W1991885087 cites W1989307207 @default.
- W1991885087 cites W1989489661 @default.
- W1991885087 cites W2004987298 @default.
- W1991885087 cites W2015063023 @default.
- W1991885087 cites W2017740115 @default.
- W1991885087 cites W2026053901 @default.
- W1991885087 cites W2042363854 @default.
- W1991885087 cites W2074722696 @default.
- W1991885087 cites W2075637530 @default.
- W1991885087 cites W2081014224 @default.
- W1991885087 cites W2081404560 @default.
- W1991885087 cites W2085026159 @default.
- W1991885087 cites W2146741496 @default.
- W1991885087 cites W2148306116 @default.
- W1991885087 cites W2332931217 @default.
- W1991885087 cites W2985224122 @default.
- W1991885087 doi "https://doi.org/10.1016/j.jlumin.2014.12.059" @default.
- W1991885087 hasPublicationYear "2015" @default.
- W1991885087 type Work @default.
- W1991885087 sameAs 1991885087 @default.
- W1991885087 citedByCount "3" @default.
- W1991885087 countsByYear W19918850872016 @default.
- W1991885087 countsByYear W19918850872018 @default.
- W1991885087 countsByYear W19918850872019 @default.
- W1991885087 crossrefType "journal-article" @default.
- W1991885087 hasAuthorship W1991885087A5042039192 @default.
- W1991885087 hasAuthorship W1991885087A5084426605 @default.
- W1991885087 hasConcept C108649604 @default.
- W1991885087 hasConcept C113196181 @default.
- W1991885087 hasConcept C121332964 @default.
- W1991885087 hasConcept C124657808 @default.
- W1991885087 hasConcept C146088050 @default.
- W1991885087 hasConcept C161368742 @default.
- W1991885087 hasConcept C171250308 @default.
- W1991885087 hasConcept C175361016 @default.
- W1991885087 hasConcept C185592680 @default.
- W1991885087 hasConcept C19067145 @default.
- W1991885087 hasConcept C192562407 @default.
- W1991885087 hasConcept C32891209 @default.
- W1991885087 hasConcept C38347018 @default.
- W1991885087 hasConcept C43617362 @default.
- W1991885087 hasConcept C49040817 @default.
- W1991885087 hasConcept C544956773 @default.
- W1991885087 hasConcept C62520636 @default.
- W1991885087 hasConcept C82706917 @default.
- W1991885087 hasConcept C85080765 @default.
- W1991885087 hasConceptScore W1991885087C108649604 @default.
- W1991885087 hasConceptScore W1991885087C113196181 @default.
- W1991885087 hasConceptScore W1991885087C121332964 @default.
- W1991885087 hasConceptScore W1991885087C124657808 @default.
- W1991885087 hasConceptScore W1991885087C146088050 @default.
- W1991885087 hasConceptScore W1991885087C161368742 @default.
- W1991885087 hasConceptScore W1991885087C171250308 @default.
- W1991885087 hasConceptScore W1991885087C175361016 @default.
- W1991885087 hasConceptScore W1991885087C185592680 @default.
- W1991885087 hasConceptScore W1991885087C19067145 @default.
- W1991885087 hasConceptScore W1991885087C192562407 @default.
- W1991885087 hasConceptScore W1991885087C32891209 @default.
- W1991885087 hasConceptScore W1991885087C38347018 @default.
- W1991885087 hasConceptScore W1991885087C43617362 @default.
- W1991885087 hasConceptScore W1991885087C49040817 @default.
- W1991885087 hasConceptScore W1991885087C544956773 @default.
- W1991885087 hasConceptScore W1991885087C62520636 @default.
- W1991885087 hasConceptScore W1991885087C82706917 @default.
- W1991885087 hasConceptScore W1991885087C85080765 @default.
- W1991885087 hasLocation W19918850871 @default.
- W1991885087 hasOpenAccess W1991885087 @default.
- W1991885087 hasPrimaryLocation W19918850871 @default.
- W1991885087 hasRelatedWork W1613605550 @default.
- W1991885087 hasRelatedWork W1966751235 @default.
- W1991885087 hasRelatedWork W1977931011 @default.
- W1991885087 hasRelatedWork W1991885087 @default.
- W1991885087 hasRelatedWork W2016950789 @default.
- W1991885087 hasRelatedWork W2042216810 @default.
- W1991885087 hasRelatedWork W2075290900 @default.
- W1991885087 hasRelatedWork W2355716196 @default.
- W1991885087 hasRelatedWork W769279115 @default.
- W1991885087 hasRelatedWork W933009432 @default.
- W1991885087 hasVolume "161" @default.
- W1991885087 isParatext "false" @default.
- W1991885087 isRetracted "false" @default.
- W1991885087 magId "1991885087" @default.
- W1991885087 workType "article" @default.