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- W1991900595 endingPage "1444" @default.
- W1991900595 startingPage "1441" @default.
- W1991900595 abstract "The feasibility of high speed direct writing of high resolution structures using a laser beam was demonstrated. Tungsten was selectively deposited on silicon via surface reduction reaction of tungsten hexafluoride. Fine lines of micron dimension with smooth surface morphology were fabricated using an argon laser at a writing speed of several cm per second. Compositions and structures of the micron-size lines, characterized using various microprobe analysis techniques including scanning Auger microprobe, Raman microprobe, and Rutherford microion-beam spectroscopy, are discussed." @default.
- W1991900595 created "2016-06-24" @default.
- W1991900595 creator A5061376096 @default.
- W1991900595 date "1985-09-01" @default.
- W1991900595 modified "2023-09-27" @default.
- W1991900595 title "Laser-induced selective deposition of micron-size structures on silicon" @default.
- W1991900595 doi "https://doi.org/10.1116/1.583006" @default.
- W1991900595 hasPublicationYear "1985" @default.
- W1991900595 type Work @default.
- W1991900595 sameAs 1991900595 @default.
- W1991900595 citedByCount "31" @default.
- W1991900595 crossrefType "journal-article" @default.
- W1991900595 hasAuthorship W1991900595A5061376096 @default.
- W1991900595 hasConcept C113196181 @default.
- W1991900595 hasConcept C120665830 @default.
- W1991900595 hasConcept C121332964 @default.
- W1991900595 hasConcept C125206250 @default.
- W1991900595 hasConcept C151730666 @default.
- W1991900595 hasConcept C178790620 @default.
- W1991900595 hasConcept C185544564 @default.
- W1991900595 hasConcept C185592680 @default.
- W1991900595 hasConcept C191897082 @default.
- W1991900595 hasConcept C192562407 @default.
- W1991900595 hasConcept C199289684 @default.
- W1991900595 hasConcept C25442681 @default.
- W1991900595 hasConcept C2816523 @default.
- W1991900595 hasConcept C40003534 @default.
- W1991900595 hasConcept C43617362 @default.
- W1991900595 hasConcept C49040817 @default.
- W1991900595 hasConcept C520434653 @default.
- W1991900595 hasConcept C542268612 @default.
- W1991900595 hasConcept C544956773 @default.
- W1991900595 hasConcept C547737533 @default.
- W1991900595 hasConcept C64297162 @default.
- W1991900595 hasConcept C86803240 @default.
- W1991900595 hasConceptScore W1991900595C113196181 @default.
- W1991900595 hasConceptScore W1991900595C120665830 @default.
- W1991900595 hasConceptScore W1991900595C121332964 @default.
- W1991900595 hasConceptScore W1991900595C125206250 @default.
- W1991900595 hasConceptScore W1991900595C151730666 @default.
- W1991900595 hasConceptScore W1991900595C178790620 @default.
- W1991900595 hasConceptScore W1991900595C185544564 @default.
- W1991900595 hasConceptScore W1991900595C185592680 @default.
- W1991900595 hasConceptScore W1991900595C191897082 @default.
- W1991900595 hasConceptScore W1991900595C192562407 @default.
- W1991900595 hasConceptScore W1991900595C199289684 @default.
- W1991900595 hasConceptScore W1991900595C25442681 @default.
- W1991900595 hasConceptScore W1991900595C2816523 @default.
- W1991900595 hasConceptScore W1991900595C40003534 @default.
- W1991900595 hasConceptScore W1991900595C43617362 @default.
- W1991900595 hasConceptScore W1991900595C49040817 @default.
- W1991900595 hasConceptScore W1991900595C520434653 @default.
- W1991900595 hasConceptScore W1991900595C542268612 @default.
- W1991900595 hasConceptScore W1991900595C544956773 @default.
- W1991900595 hasConceptScore W1991900595C547737533 @default.
- W1991900595 hasConceptScore W1991900595C64297162 @default.
- W1991900595 hasConceptScore W1991900595C86803240 @default.
- W1991900595 hasIssue "5" @default.
- W1991900595 hasLocation W19919005951 @default.
- W1991900595 hasOpenAccess W1991900595 @default.
- W1991900595 hasPrimaryLocation W19919005951 @default.
- W1991900595 hasRelatedWork W1851204181 @default.
- W1991900595 hasRelatedWork W1969818500 @default.
- W1991900595 hasRelatedWork W1973380128 @default.
- W1991900595 hasRelatedWork W1978943269 @default.
- W1991900595 hasRelatedWork W1984568539 @default.
- W1991900595 hasRelatedWork W2058078755 @default.
- W1991900595 hasRelatedWork W2070429397 @default.
- W1991900595 hasRelatedWork W2076665873 @default.
- W1991900595 hasRelatedWork W2093016299 @default.
- W1991900595 hasRelatedWork W4321517186 @default.
- W1991900595 hasVolume "3" @default.
- W1991900595 isParatext "false" @default.
- W1991900595 isRetracted "false" @default.
- W1991900595 magId "1991900595" @default.
- W1991900595 workType "article" @default.