Matches in SemOpenAlex for { <https://semopenalex.org/work/W1991928462> ?p ?o ?g. }
- W1991928462 endingPage "782" @default.
- W1991928462 startingPage "777" @default.
- W1991928462 abstract "The most recent development together with some challenging opportunities on barrier layers for copper metallization has been reviewed. This review study mainly focuses on the technology trends in interconnect metallization, with emphasis on barrier layer materials, mechanism that dominates diffusion in barrier layer materials, and promising candidate barrier layers for copper metallization in LSIs. The applicability of different materials as diffusion barriers in copper-based interconnects has also been assessed for practical usage." @default.
- W1991928462 created "2016-06-24" @default.
- W1991928462 creator A5050350023 @default.
- W1991928462 creator A5054323717 @default.
- W1991928462 creator A5055610241 @default.
- W1991928462 date "2007-06-01" @default.
- W1991928462 modified "2023-10-18" @default.
- W1991928462 title "Prospective development in diffusion barrier layers for copper metallization in LSI" @default.
- W1991928462 cites W1598715350 @default.
- W1991928462 cites W1608170468 @default.
- W1991928462 cites W1958232380 @default.
- W1991928462 cites W1964134831 @default.
- W1991928462 cites W1971265113 @default.
- W1991928462 cites W1971995833 @default.
- W1991928462 cites W1980774383 @default.
- W1991928462 cites W1981434648 @default.
- W1991928462 cites W1984192523 @default.
- W1991928462 cites W1988359053 @default.
- W1991928462 cites W1988491864 @default.
- W1991928462 cites W2002651922 @default.
- W1991928462 cites W2007551590 @default.
- W1991928462 cites W2014649041 @default.
- W1991928462 cites W2018091598 @default.
- W1991928462 cites W2020192844 @default.
- W1991928462 cites W2031914352 @default.
- W1991928462 cites W2045258737 @default.
- W1991928462 cites W2046056082 @default.
- W1991928462 cites W2047586901 @default.
- W1991928462 cites W2050299543 @default.
- W1991928462 cites W2071395325 @default.
- W1991928462 cites W2074934419 @default.
- W1991928462 cites W2078524837 @default.
- W1991928462 cites W2081404287 @default.
- W1991928462 cites W2089535361 @default.
- W1991928462 cites W2090508036 @default.
- W1991928462 cites W4245083218 @default.
- W1991928462 doi "https://doi.org/10.1016/j.mejo.2007.04.011" @default.
- W1991928462 hasPublicationYear "2007" @default.
- W1991928462 type Work @default.
- W1991928462 sameAs 1991928462 @default.
- W1991928462 citedByCount "35" @default.
- W1991928462 countsByYear W19919284622012 @default.
- W1991928462 countsByYear W19919284622013 @default.
- W1991928462 countsByYear W19919284622014 @default.
- W1991928462 countsByYear W19919284622015 @default.
- W1991928462 countsByYear W19919284622016 @default.
- W1991928462 countsByYear W19919284622017 @default.
- W1991928462 countsByYear W19919284622018 @default.
- W1991928462 countsByYear W19919284622019 @default.
- W1991928462 countsByYear W19919284622020 @default.
- W1991928462 countsByYear W19919284622021 @default.
- W1991928462 countsByYear W19919284622022 @default.
- W1991928462 countsByYear W19919284622023 @default.
- W1991928462 crossrefType "journal-article" @default.
- W1991928462 hasAuthorship W1991928462A5050350023 @default.
- W1991928462 hasAuthorship W1991928462A5054323717 @default.
- W1991928462 hasAuthorship W1991928462A5055610241 @default.
- W1991928462 hasConcept C121332964 @default.
- W1991928462 hasConcept C127413603 @default.
- W1991928462 hasConcept C171250308 @default.
- W1991928462 hasConcept C191897082 @default.
- W1991928462 hasConcept C192562407 @default.
- W1991928462 hasConcept C2778836790 @default.
- W1991928462 hasConcept C2779227376 @default.
- W1991928462 hasConcept C2779833192 @default.
- W1991928462 hasConcept C544778455 @default.
- W1991928462 hasConcept C61696701 @default.
- W1991928462 hasConcept C69357855 @default.
- W1991928462 hasConcept C97355855 @default.
- W1991928462 hasConceptScore W1991928462C121332964 @default.
- W1991928462 hasConceptScore W1991928462C127413603 @default.
- W1991928462 hasConceptScore W1991928462C171250308 @default.
- W1991928462 hasConceptScore W1991928462C191897082 @default.
- W1991928462 hasConceptScore W1991928462C192562407 @default.
- W1991928462 hasConceptScore W1991928462C2778836790 @default.
- W1991928462 hasConceptScore W1991928462C2779227376 @default.
- W1991928462 hasConceptScore W1991928462C2779833192 @default.
- W1991928462 hasConceptScore W1991928462C544778455 @default.
- W1991928462 hasConceptScore W1991928462C61696701 @default.
- W1991928462 hasConceptScore W1991928462C69357855 @default.
- W1991928462 hasConceptScore W1991928462C97355855 @default.
- W1991928462 hasIssue "6-7" @default.
- W1991928462 hasLocation W19919284621 @default.
- W1991928462 hasOpenAccess W1991928462 @default.
- W1991928462 hasPrimaryLocation W19919284621 @default.
- W1991928462 hasRelatedWork W1978126146 @default.
- W1991928462 hasRelatedWork W1991928462 @default.
- W1991928462 hasRelatedWork W2046224594 @default.
- W1991928462 hasRelatedWork W2053774067 @default.
- W1991928462 hasRelatedWork W2061064471 @default.
- W1991928462 hasRelatedWork W2106900477 @default.
- W1991928462 hasRelatedWork W2376889272 @default.
- W1991928462 hasRelatedWork W2526962263 @default.
- W1991928462 hasRelatedWork W3143555417 @default.
- W1991928462 hasRelatedWork W4200428235 @default.
- W1991928462 hasVolume "38" @default.
- W1991928462 isParatext "false" @default.
- W1991928462 isRetracted "false" @default.