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- W1992006243 abstract "The fabrication of masks used in storage ring X-ray lithography is described. These masks consist of a gold absorber electroplated over a substrate formed by a thin boron-doped silicon membrane covered by a layer of polyimide. Measurement of the properties of the materials which are of concern in this application is also described." @default.
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- W1992006243 date "1984-03-19" @default.
- W1992006243 modified "2023-10-16" @default.
- W1992006243 title "<title>B-Si masks for storage ring X-ray lithography</title>" @default.
- W1992006243 doi "https://doi.org/10.1117/12.939214" @default.
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