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- W1992022052 abstract "The degradation of the catalytic filaments is the main factor limiting the industrial implementation of the hot wire chemical vapor deposition (HWCVD) technique. Up to now, no solution has been found to protect the catalytic filaments used in HWCVD without compromising their catalytic activity. Probably, the definitive solution relies on the automatic replacement of the catalytic filaments. In this work, the results of the validation tests of a new apparatus for the automatic replacement of the catalytic filaments are reported. The functionalities of the different parts have been validated using a 0.2 mm diameter tungsten filament under μc-Si:H deposition conditions." @default.
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- W1992022052 date "2015-01-01" @default.
- W1992022052 modified "2023-09-27" @default.
- W1992022052 title "Technological solution for the automatic replacement of the catalytic filaments in HWCVD" @default.
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- W1992022052 doi "https://doi.org/10.1016/j.tsf.2014.10.010" @default.
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