Matches in SemOpenAlex for { <https://semopenalex.org/work/W1992040346> ?p ?o ?g. }
- W1992040346 endingPage "475302" @default.
- W1992040346 startingPage "475302" @default.
- W1992040346 abstract "Si(1-x)Ge(x) islands grown on Si patterned substrates have received considerable attention during the last decade for potential applications in microelectronics and optoelectronics. In this work we propose a new methodology to grow Ge-rich islands using a chemical vapour deposition technique. Electron-beam lithography is used to pre-pattern Si substrates, creating material traps. Epitaxial deposition of thin Ge films by low-energy plasma-enhanced chemical vapour deposition then leads to the formation of Ge-rich Si(1-x)Ge(x) islands (x > 0.8) with a homogeneous size distribution, precisely positioned with respect to the substrate pattern. The island morphology was characterized by atomic force microscopy, and the Ge content and strain in the islands was studied by μRaman spectroscopy. This characterization indicates a uniform distribution of islands with high Ge content and low strain: this suggests that the relatively high growth rate (0.1 nm s(-1)) and low temperature (650 °C) used is able to limit Si intermixing, while maintaining a long enough adatom diffusion length to prevent nucleation of islands outside pits. This offers the novel possibility of using these Ge-rich islands to induce strain in a Si cap." @default.
- W1992040346 created "2016-06-24" @default.
- W1992040346 creator A5014667264 @default.
- W1992040346 creator A5029986980 @default.
- W1992040346 creator A5041171592 @default.
- W1992040346 creator A5053893486 @default.
- W1992040346 creator A5059327252 @default.
- W1992040346 creator A5056359962 @default.
- W1992040346 date "2010-10-29" @default.
- W1992040346 modified "2023-09-26" @default.
- W1992040346 title "Ge-rich islands grown on patterned Si substrates by low-energy plasma-enhanced chemical vapour deposition" @default.
- W1992040346 cites W1609820206 @default.
- W1992040346 cites W1627629810 @default.
- W1992040346 cites W1644315884 @default.
- W1992040346 cites W1809043189 @default.
- W1992040346 cites W1963749213 @default.
- W1992040346 cites W1988280571 @default.
- W1992040346 cites W1989843937 @default.
- W1992040346 cites W1990653007 @default.
- W1992040346 cites W1991543110 @default.
- W1992040346 cites W1993921415 @default.
- W1992040346 cites W1999648568 @default.
- W1992040346 cites W2004083430 @default.
- W1992040346 cites W2005778734 @default.
- W1992040346 cites W2008375944 @default.
- W1992040346 cites W2024708839 @default.
- W1992040346 cites W2026951078 @default.
- W1992040346 cites W2032961470 @default.
- W1992040346 cites W2034924088 @default.
- W1992040346 cites W2035346756 @default.
- W1992040346 cites W2038667420 @default.
- W1992040346 cites W2042015445 @default.
- W1992040346 cites W2046779625 @default.
- W1992040346 cites W2049937148 @default.
- W1992040346 cites W2057088520 @default.
- W1992040346 cites W2066247168 @default.
- W1992040346 cites W2070329899 @default.
- W1992040346 cites W2072578803 @default.
- W1992040346 cites W2074820025 @default.
- W1992040346 cites W2076634909 @default.
- W1992040346 cites W2078475532 @default.
- W1992040346 cites W2090074168 @default.
- W1992040346 cites W2093424558 @default.
- W1992040346 cites W2118416256 @default.
- W1992040346 cites W2120631236 @default.
- W1992040346 cites W2161779880 @default.
- W1992040346 cites W2167834919 @default.
- W1992040346 doi "https://doi.org/10.1088/0957-4484/21/47/475302" @default.
- W1992040346 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/21030775" @default.
- W1992040346 hasPublicationYear "2010" @default.
- W1992040346 type Work @default.
- W1992040346 sameAs 1992040346 @default.
- W1992040346 citedByCount "21" @default.
- W1992040346 countsByYear W19920403462012 @default.
- W1992040346 countsByYear W19920403462013 @default.
- W1992040346 countsByYear W19920403462014 @default.
- W1992040346 countsByYear W19920403462015 @default.
- W1992040346 countsByYear W19920403462016 @default.
- W1992040346 countsByYear W19920403462017 @default.
- W1992040346 countsByYear W19920403462018 @default.
- W1992040346 countsByYear W19920403462020 @default.
- W1992040346 countsByYear W19920403462022 @default.
- W1992040346 countsByYear W19920403462023 @default.
- W1992040346 crossrefType "journal-article" @default.
- W1992040346 hasAuthorship W1992040346A5014667264 @default.
- W1992040346 hasAuthorship W1992040346A5029986980 @default.
- W1992040346 hasAuthorship W1992040346A5041171592 @default.
- W1992040346 hasAuthorship W1992040346A5053893486 @default.
- W1992040346 hasAuthorship W1992040346A5056359962 @default.
- W1992040346 hasAuthorship W1992040346A5059327252 @default.
- W1992040346 hasConcept C110738630 @default.
- W1992040346 hasConcept C111368507 @default.
- W1992040346 hasConcept C113196181 @default.
- W1992040346 hasConcept C120665830 @default.
- W1992040346 hasConcept C121332964 @default.
- W1992040346 hasConcept C127313418 @default.
- W1992040346 hasConcept C151730666 @default.
- W1992040346 hasConcept C171250308 @default.
- W1992040346 hasConcept C178790620 @default.
- W1992040346 hasConcept C185592680 @default.
- W1992040346 hasConcept C187937830 @default.
- W1992040346 hasConcept C192562407 @default.
- W1992040346 hasConcept C2777289219 @default.
- W1992040346 hasConcept C2779227376 @default.
- W1992040346 hasConcept C2816523 @default.
- W1992040346 hasConcept C40003534 @default.
- W1992040346 hasConcept C43617362 @default.
- W1992040346 hasConcept C49040817 @default.
- W1992040346 hasConcept C544956773 @default.
- W1992040346 hasConcept C550623735 @default.
- W1992040346 hasConcept C57410435 @default.
- W1992040346 hasConcept C61048295 @default.
- W1992040346 hasConcept C64297162 @default.
- W1992040346 hasConcept C86803240 @default.
- W1992040346 hasConceptScore W1992040346C110738630 @default.
- W1992040346 hasConceptScore W1992040346C111368507 @default.
- W1992040346 hasConceptScore W1992040346C113196181 @default.
- W1992040346 hasConceptScore W1992040346C120665830 @default.