Matches in SemOpenAlex for { <https://semopenalex.org/work/W1992056522> ?p ?o ?g. }
Showing items 1 to 93 of
93
with 100 items per page.
- W1992056522 endingPage "34" @default.
- W1992056522 startingPage "31" @default.
- W1992056522 abstract "The results of reactive ion etching of GaAs in Freon-12 plasma and its mixtures with oxygen are presented. The dependencies of etching rate on target temperature, plasma pressure and composition of etching gas mixture are considered. The influence of ion bombardment on the process of etching is studied. The elemental composition of the surface was measured using Auger electron spectroscopy and X-ray photoelectron spectroscopy. It is shown that the film with a complicated composition is grown on the surface during etching, but it does not stop the etching process. At a lower concentration of oxygen in the etching gas mixture, the formed oxide layer on the surface becomes non-homogeneous, having a high concentration of impurities." @default.
- W1992056522 created "2016-06-24" @default.
- W1992056522 creator A5023045797 @default.
- W1992056522 date "1998-11-01" @default.
- W1992056522 modified "2023-09-27" @default.
- W1992056522 title "The surface composition of GaAs affected by reactive plasma" @default.
- W1992056522 cites W1967302545 @default.
- W1992056522 cites W2038299739 @default.
- W1992056522 cites W2051925063 @default.
- W1992056522 cites W2057318452 @default.
- W1992056522 cites W2060761839 @default.
- W1992056522 cites W2064473016 @default.
- W1992056522 cites W2084220983 @default.
- W1992056522 doi "https://doi.org/10.1016/s0257-8972(98)00551-9" @default.
- W1992056522 hasPublicationYear "1998" @default.
- W1992056522 type Work @default.
- W1992056522 sameAs 1992056522 @default.
- W1992056522 citedByCount "5" @default.
- W1992056522 countsByYear W19920565222014 @default.
- W1992056522 countsByYear W19920565222018 @default.
- W1992056522 crossrefType "journal-article" @default.
- W1992056522 hasAuthorship W1992056522A5023045797 @default.
- W1992056522 hasConcept C100460472 @default.
- W1992056522 hasConcept C107187091 @default.
- W1992056522 hasConcept C113196181 @default.
- W1992056522 hasConcept C121332964 @default.
- W1992056522 hasConcept C127413603 @default.
- W1992056522 hasConcept C130472188 @default.
- W1992056522 hasConcept C159985019 @default.
- W1992056522 hasConcept C175708663 @default.
- W1992056522 hasConcept C175721412 @default.
- W1992056522 hasConcept C178790620 @default.
- W1992056522 hasConcept C185544564 @default.
- W1992056522 hasConcept C185592680 @default.
- W1992056522 hasConcept C191897082 @default.
- W1992056522 hasConcept C192562407 @default.
- W1992056522 hasConcept C25442681 @default.
- W1992056522 hasConcept C2779227376 @default.
- W1992056522 hasConcept C2779851234 @default.
- W1992056522 hasConcept C42360764 @default.
- W1992056522 hasConcept C43617362 @default.
- W1992056522 hasConcept C540031477 @default.
- W1992056522 hasConcept C62520636 @default.
- W1992056522 hasConcept C64980472 @default.
- W1992056522 hasConcept C71987851 @default.
- W1992056522 hasConcept C82706917 @default.
- W1992056522 hasConcept C97355855 @default.
- W1992056522 hasConceptScore W1992056522C100460472 @default.
- W1992056522 hasConceptScore W1992056522C107187091 @default.
- W1992056522 hasConceptScore W1992056522C113196181 @default.
- W1992056522 hasConceptScore W1992056522C121332964 @default.
- W1992056522 hasConceptScore W1992056522C127413603 @default.
- W1992056522 hasConceptScore W1992056522C130472188 @default.
- W1992056522 hasConceptScore W1992056522C159985019 @default.
- W1992056522 hasConceptScore W1992056522C175708663 @default.
- W1992056522 hasConceptScore W1992056522C175721412 @default.
- W1992056522 hasConceptScore W1992056522C178790620 @default.
- W1992056522 hasConceptScore W1992056522C185544564 @default.
- W1992056522 hasConceptScore W1992056522C185592680 @default.
- W1992056522 hasConceptScore W1992056522C191897082 @default.
- W1992056522 hasConceptScore W1992056522C192562407 @default.
- W1992056522 hasConceptScore W1992056522C25442681 @default.
- W1992056522 hasConceptScore W1992056522C2779227376 @default.
- W1992056522 hasConceptScore W1992056522C2779851234 @default.
- W1992056522 hasConceptScore W1992056522C42360764 @default.
- W1992056522 hasConceptScore W1992056522C43617362 @default.
- W1992056522 hasConceptScore W1992056522C540031477 @default.
- W1992056522 hasConceptScore W1992056522C62520636 @default.
- W1992056522 hasConceptScore W1992056522C64980472 @default.
- W1992056522 hasConceptScore W1992056522C71987851 @default.
- W1992056522 hasConceptScore W1992056522C82706917 @default.
- W1992056522 hasConceptScore W1992056522C97355855 @default.
- W1992056522 hasIssue "1-2" @default.
- W1992056522 hasLocation W19920565221 @default.
- W1992056522 hasOpenAccess W1992056522 @default.
- W1992056522 hasPrimaryLocation W19920565221 @default.
- W1992056522 hasRelatedWork W1660000098 @default.
- W1992056522 hasRelatedWork W1965746364 @default.
- W1992056522 hasRelatedWork W1990208142 @default.
- W1992056522 hasRelatedWork W2002207621 @default.
- W1992056522 hasRelatedWork W2064094521 @default.
- W1992056522 hasRelatedWork W2071338444 @default.
- W1992056522 hasRelatedWork W2089108734 @default.
- W1992056522 hasRelatedWork W2110328426 @default.
- W1992056522 hasRelatedWork W3088781076 @default.
- W1992056522 hasRelatedWork W792636976 @default.
- W1992056522 hasVolume "110" @default.
- W1992056522 isParatext "false" @default.
- W1992056522 isRetracted "false" @default.
- W1992056522 magId "1992056522" @default.
- W1992056522 workType "article" @default.