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- W1992078245 abstract "Cr2O3 and ferromagnetic chromium dioxide have been fabricated by ultraviolet photolytic and plasma-assisted decomposition of Cr(CO)6 in oxygen carrier gas. The photolysis process is surface mediated and proceeds by the sequential removal of (CO) groups. It yields different surface morphologies, and control of the substrate temperature is essential for optimum results. The plasma-assisted deposited films exhibit long-range ferromagnetic order and sufficient flatness to be utilized as a magneto-optic recording medium. The thermodynamic cycle of the plasma process was determined. Consequences for using such films are discussed." @default.
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- W1992078245 date "1991-03-01" @default.
- W1992078245 modified "2023-10-01" @default.
- W1992078245 title "Chromium oxide films fabricated by Cr(CO)6 chemical vapor deposition" @default.
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- W1992078245 doi "https://doi.org/10.1016/0040-6090(91)90349-3" @default.
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