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- W1992083446 abstract "Geometric measurements based on optical methods have been studied, and the capacitance sensor is appliedto detect the focusing displacement. In order to improve the edge effect of the flat capacitance sensor, anequipotential ring is used. According to the Abbe principle, a double equipotential rings flat capacitance sensorwith a central hole is developed. The axis of the optical system perforates through the hole of the sensor, thusavoiding the Abbe error. In order to get narrow gap between the equipotential ring and the electrode as well asthin electrodes, MEMS technique is applied to machine the capacitance electrodes, then the gap between thering and the electrode can be no more than 10μm, meanwhile the measurement accuracy can be promotedgreatly. This paper emphasizes on the design of structure flat capacitance sensor and the manufacture ofdouble rings capacitor with MEMS technique. After completing the circuit and finishing the experiment fortesting the sensor, it can make further qualitative analysis on the result of the linearity and the sensitivity." @default.
- W1992083446 created "2016-06-24" @default.
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- W1992083446 date "2007-11-29" @default.
- W1992083446 modified "2023-09-23" @default.
- W1992083446 title "Study on the MEMS technique of flat capacitance sensor with double equipotential rings in ultra-precise optical measurement" @default.
- W1992083446 doi "https://doi.org/10.1117/12.756295" @default.
- W1992083446 hasPublicationYear "2007" @default.
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