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- W1992154636 endingPage "L945" @default.
- W1992154636 startingPage "L945" @default.
- W1992154636 abstract "A self-planarized Au metallization process by electrolytic plating has been developed for metal interconnections in the submicron range. Gold wires with depth-to-width aspect ratio higher than 2 were fabricated in a buried structure within the dielectric spacer. By etching of Au and oxidizing the surface of TiW in the field, the gold wires can be selectively formed and planarized within the dielectrics. This process can provide desired properties of conductor structures for Si LSI applications. More important, the process is economically viable due to its simplicity and low cost in capital equipment purchase, maintenance and operation." @default.
- W1992154636 created "2016-06-24" @default.
- W1992154636 creator A5029686389 @default.
- W1992154636 creator A5065633162 @default.
- W1992154636 date "1995-07-01" @default.
- W1992154636 modified "2023-10-18" @default.
- W1992154636 title "Downsizing Gold Wires to Submicron Range: A Self-Planarized Au Metallization Process by Selective Electroplating for Si LSI Applications" @default.
- W1992154636 cites W1985956406 @default.
- W1992154636 cites W2003039352 @default.
- W1992154636 doi "https://doi.org/10.1143/jjap.34.l945" @default.
- W1992154636 hasPublicationYear "1995" @default.
- W1992154636 type Work @default.
- W1992154636 sameAs 1992154636 @default.
- W1992154636 citedByCount "2" @default.
- W1992154636 crossrefType "journal-article" @default.
- W1992154636 hasAuthorship W1992154636A5029686389 @default.
- W1992154636 hasAuthorship W1992154636A5065633162 @default.
- W1992154636 hasConcept C100460472 @default.
- W1992154636 hasConcept C115903868 @default.
- W1992154636 hasConcept C127313418 @default.
- W1992154636 hasConcept C133386390 @default.
- W1992154636 hasConcept C154843443 @default.
- W1992154636 hasConcept C159985019 @default.
- W1992154636 hasConcept C171250308 @default.
- W1992154636 hasConcept C178790620 @default.
- W1992154636 hasConcept C180088628 @default.
- W1992154636 hasConcept C185592680 @default.
- W1992154636 hasConcept C192562407 @default.
- W1992154636 hasConcept C2776985018 @default.
- W1992154636 hasConcept C2779227376 @default.
- W1992154636 hasConcept C34800285 @default.
- W1992154636 hasConcept C41008148 @default.
- W1992154636 hasConcept C49040817 @default.
- W1992154636 hasConcept C51807945 @default.
- W1992154636 hasConcept C77176794 @default.
- W1992154636 hasConcept C8058405 @default.
- W1992154636 hasConcept C94530137 @default.
- W1992154636 hasConceptScore W1992154636C100460472 @default.
- W1992154636 hasConceptScore W1992154636C115903868 @default.
- W1992154636 hasConceptScore W1992154636C127313418 @default.
- W1992154636 hasConceptScore W1992154636C133386390 @default.
- W1992154636 hasConceptScore W1992154636C154843443 @default.
- W1992154636 hasConceptScore W1992154636C159985019 @default.
- W1992154636 hasConceptScore W1992154636C171250308 @default.
- W1992154636 hasConceptScore W1992154636C178790620 @default.
- W1992154636 hasConceptScore W1992154636C180088628 @default.
- W1992154636 hasConceptScore W1992154636C185592680 @default.
- W1992154636 hasConceptScore W1992154636C192562407 @default.
- W1992154636 hasConceptScore W1992154636C2776985018 @default.
- W1992154636 hasConceptScore W1992154636C2779227376 @default.
- W1992154636 hasConceptScore W1992154636C34800285 @default.
- W1992154636 hasConceptScore W1992154636C41008148 @default.
- W1992154636 hasConceptScore W1992154636C49040817 @default.
- W1992154636 hasConceptScore W1992154636C51807945 @default.
- W1992154636 hasConceptScore W1992154636C77176794 @default.
- W1992154636 hasConceptScore W1992154636C8058405 @default.
- W1992154636 hasConceptScore W1992154636C94530137 @default.
- W1992154636 hasIssue "7B" @default.
- W1992154636 hasLocation W19921546361 @default.
- W1992154636 hasOpenAccess W1992154636 @default.
- W1992154636 hasPrimaryLocation W19921546361 @default.
- W1992154636 hasRelatedWork W1992154636 @default.
- W1992154636 hasRelatedWork W2027707653 @default.
- W1992154636 hasRelatedWork W2085960099 @default.
- W1992154636 hasRelatedWork W2087059879 @default.
- W1992154636 hasRelatedWork W2124018666 @default.
- W1992154636 hasRelatedWork W2367657764 @default.
- W1992154636 hasRelatedWork W2371971493 @default.
- W1992154636 hasRelatedWork W2525398797 @default.
- W1992154636 hasRelatedWork W2885758390 @default.
- W1992154636 hasRelatedWork W3157895794 @default.
- W1992154636 hasVolume "34" @default.
- W1992154636 isParatext "false" @default.
- W1992154636 isRetracted "false" @default.
- W1992154636 magId "1992154636" @default.
- W1992154636 workType "article" @default.