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- W1992160371 abstract "Abstract In this work we compare the performance of Scanning Capacitance Microscopy and Scanning Spreading Resistance Microscopy for the characterization of doping profiles in semiconductor devices. Particular attention is devoted to parameters of paramount importance for the failure analysis and the characterization of silicon devices, like the quantitative one-dimensional profiling accuracy, the electrical junction delineation and the two-dimensional sub-micron imaging capability." @default.
- W1992160371 created "2016-06-24" @default.
- W1992160371 creator A5029045739 @default.
- W1992160371 creator A5045059397 @default.
- W1992160371 creator A5055702327 @default.
- W1992160371 date "2005-09-01" @default.
- W1992160371 modified "2023-10-14" @default.
- W1992160371 title "Assessment of the Analytical Capabilities of Scanning Capacitance and Scanning Spreading Resistance Microscopy Applied to Semiconductor Devices" @default.
- W1992160371 cites W1980574975 @default.
- W1992160371 cites W2008361798 @default.
- W1992160371 cites W2010013380 @default.
- W1992160371 cites W2040930700 @default.
- W1992160371 cites W2047470743 @default.
- W1992160371 cites W2053805921 @default.
- W1992160371 cites W2074859606 @default.
- W1992160371 doi "https://doi.org/10.1016/j.microrel.2005.07.058" @default.
- W1992160371 hasPublicationYear "2005" @default.
- W1992160371 type Work @default.
- W1992160371 sameAs 1992160371 @default.
- W1992160371 citedByCount "6" @default.
- W1992160371 countsByYear W19921603712015 @default.
- W1992160371 countsByYear W19921603712020 @default.
- W1992160371 countsByYear W19921603712021 @default.
- W1992160371 crossrefType "journal-article" @default.
- W1992160371 hasAuthorship W1992160371A5029045739 @default.
- W1992160371 hasAuthorship W1992160371A5045059397 @default.
- W1992160371 hasAuthorship W1992160371A5055702327 @default.
- W1992160371 hasConcept C108225325 @default.
- W1992160371 hasConcept C111919701 @default.
- W1992160371 hasConcept C120665830 @default.
- W1992160371 hasConcept C121332964 @default.
- W1992160371 hasConcept C127413603 @default.
- W1992160371 hasConcept C147080431 @default.
- W1992160371 hasConcept C147789679 @default.
- W1992160371 hasConcept C159985019 @default.
- W1992160371 hasConcept C16777580 @default.
- W1992160371 hasConcept C171250308 @default.
- W1992160371 hasConcept C17525397 @default.
- W1992160371 hasConcept C185592680 @default.
- W1992160371 hasConcept C187191949 @default.
- W1992160371 hasConcept C187921700 @default.
- W1992160371 hasConcept C192562407 @default.
- W1992160371 hasConcept C207521374 @default.
- W1992160371 hasConcept C24326235 @default.
- W1992160371 hasConcept C26771246 @default.
- W1992160371 hasConcept C2779227376 @default.
- W1992160371 hasConcept C2780841128 @default.
- W1992160371 hasConcept C30066665 @default.
- W1992160371 hasConcept C36628996 @default.
- W1992160371 hasConcept C41008148 @default.
- W1992160371 hasConcept C49040817 @default.
- W1992160371 hasConcept C544956773 @default.
- W1992160371 hasConcept C57863236 @default.
- W1992160371 hasConcept C79635011 @default.
- W1992160371 hasConcept C99752389 @default.
- W1992160371 hasConceptScore W1992160371C108225325 @default.
- W1992160371 hasConceptScore W1992160371C111919701 @default.
- W1992160371 hasConceptScore W1992160371C120665830 @default.
- W1992160371 hasConceptScore W1992160371C121332964 @default.
- W1992160371 hasConceptScore W1992160371C127413603 @default.
- W1992160371 hasConceptScore W1992160371C147080431 @default.
- W1992160371 hasConceptScore W1992160371C147789679 @default.
- W1992160371 hasConceptScore W1992160371C159985019 @default.
- W1992160371 hasConceptScore W1992160371C16777580 @default.
- W1992160371 hasConceptScore W1992160371C171250308 @default.
- W1992160371 hasConceptScore W1992160371C17525397 @default.
- W1992160371 hasConceptScore W1992160371C185592680 @default.
- W1992160371 hasConceptScore W1992160371C187191949 @default.
- W1992160371 hasConceptScore W1992160371C187921700 @default.
- W1992160371 hasConceptScore W1992160371C192562407 @default.
- W1992160371 hasConceptScore W1992160371C207521374 @default.
- W1992160371 hasConceptScore W1992160371C24326235 @default.
- W1992160371 hasConceptScore W1992160371C26771246 @default.
- W1992160371 hasConceptScore W1992160371C2779227376 @default.
- W1992160371 hasConceptScore W1992160371C2780841128 @default.
- W1992160371 hasConceptScore W1992160371C30066665 @default.
- W1992160371 hasConceptScore W1992160371C36628996 @default.
- W1992160371 hasConceptScore W1992160371C41008148 @default.
- W1992160371 hasConceptScore W1992160371C49040817 @default.
- W1992160371 hasConceptScore W1992160371C544956773 @default.
- W1992160371 hasConceptScore W1992160371C57863236 @default.
- W1992160371 hasConceptScore W1992160371C79635011 @default.
- W1992160371 hasConceptScore W1992160371C99752389 @default.
- W1992160371 hasLocation W19921603711 @default.
- W1992160371 hasOpenAccess W1992160371 @default.
- W1992160371 hasPrimaryLocation W19921603711 @default.
- W1992160371 hasRelatedWork W1535912137 @default.
- W1992160371 hasRelatedWork W1609509898 @default.
- W1992160371 hasRelatedWork W1741299733 @default.
- W1992160371 hasRelatedWork W1908896971 @default.
- W1992160371 hasRelatedWork W2017452348 @default.
- W1992160371 hasRelatedWork W2048457333 @default.
- W1992160371 hasRelatedWork W2055264846 @default.
- W1992160371 hasRelatedWork W2093907176 @default.
- W1992160371 hasRelatedWork W2575211708 @default.
- W1992160371 hasRelatedWork W1656762938 @default.
- W1992160371 isParatext "false" @default.
- W1992160371 isRetracted "false" @default.
- W1992160371 magId "1992160371" @default.
- W1992160371 workType "article" @default.