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- W1992163942 endingPage "188" @default.
- W1992163942 startingPage "185" @default.
- W1992163942 abstract "Planar defects, like anti-phase boundaries (APBs) and stacking faults (SFs), are reduced by growing 3C-SiC on undulant-Si whose entire surface is covered with countered slopes oriented in the [1 1 0] and [1¯1¯0] directions. During the initial 3C-SiC growth, APBs are eliminated on each slope of an undulation. Then, one kind of SF self-vanishes. However, another kind of SF remains on the 3C-SiC surface, although its density is gradually reduced with increasing SiC thickness by combining with a counter-SF. The leakage current of a pn diode fabricated homo-epitaxially on 3C-SiC is roughly proportional to the SF density before homo-epitaxial growth. The viability of 3C-SiC grown on undulant-Si for semiconductor devices is discussed by reviewing recent reports on various MOS-FETs using it as the substrate. The key issue in the fabrication of a MOS-FET as a power-switching device operated at high-voltage is to reduce the leakage-current at the pn junction, thereby eliminating SFs." @default.
- W1992163942 created "2016-06-24" @default.
- W1992163942 creator A5007467892 @default.
- W1992163942 creator A5033591878 @default.
- W1992163942 creator A5059603663 @default.
- W1992163942 creator A5088898677 @default.
- W1992163942 creator A5091698608 @default.
- W1992163942 date "2006-01-01" @default.
- W1992163942 modified "2023-09-24" @default.
- W1992163942 title "Hetero- and homo-epitaxial growth of 3C-SiC for MOS-FETs" @default.
- W1992163942 cites W1969094933 @default.
- W1992163942 cites W1973550380 @default.
- W1992163942 cites W1979567753 @default.
- W1992163942 cites W2033692124 @default.
- W1992163942 cites W2050007312 @default.
- W1992163942 cites W2057023034 @default.
- W1992163942 cites W2101163952 @default.
- W1992163942 cites W2159574888 @default.
- W1992163942 doi "https://doi.org/10.1016/j.mee.2005.10.046" @default.
- W1992163942 hasPublicationYear "2006" @default.
- W1992163942 type Work @default.
- W1992163942 sameAs 1992163942 @default.
- W1992163942 citedByCount "38" @default.
- W1992163942 countsByYear W19921639422012 @default.
- W1992163942 countsByYear W19921639422014 @default.
- W1992163942 countsByYear W19921639422016 @default.
- W1992163942 countsByYear W19921639422017 @default.
- W1992163942 countsByYear W19921639422018 @default.
- W1992163942 countsByYear W19921639422019 @default.
- W1992163942 countsByYear W19921639422020 @default.
- W1992163942 countsByYear W19921639422021 @default.
- W1992163942 countsByYear W19921639422022 @default.
- W1992163942 crossrefType "journal-article" @default.
- W1992163942 hasAuthorship W1992163942A5007467892 @default.
- W1992163942 hasAuthorship W1992163942A5033591878 @default.
- W1992163942 hasAuthorship W1992163942A5059603663 @default.
- W1992163942 hasAuthorship W1992163942A5088898677 @default.
- W1992163942 hasAuthorship W1992163942A5091698608 @default.
- W1992163942 hasConcept C108225325 @default.
- W1992163942 hasConcept C110738630 @default.
- W1992163942 hasConcept C111368507 @default.
- W1992163942 hasConcept C127313418 @default.
- W1992163942 hasConcept C136525101 @default.
- W1992163942 hasConcept C139719470 @default.
- W1992163942 hasConcept C142724271 @default.
- W1992163942 hasConcept C162324750 @default.
- W1992163942 hasConcept C171250308 @default.
- W1992163942 hasConcept C178790620 @default.
- W1992163942 hasConcept C185592680 @default.
- W1992163942 hasConcept C192562407 @default.
- W1992163942 hasConcept C204787440 @default.
- W1992163942 hasConcept C2777042071 @default.
- W1992163942 hasConcept C2777289219 @default.
- W1992163942 hasConcept C2779227376 @default.
- W1992163942 hasConcept C33347731 @default.
- W1992163942 hasConcept C49040817 @default.
- W1992163942 hasConcept C71924100 @default.
- W1992163942 hasConcept C78434282 @default.
- W1992163942 hasConceptScore W1992163942C108225325 @default.
- W1992163942 hasConceptScore W1992163942C110738630 @default.
- W1992163942 hasConceptScore W1992163942C111368507 @default.
- W1992163942 hasConceptScore W1992163942C127313418 @default.
- W1992163942 hasConceptScore W1992163942C136525101 @default.
- W1992163942 hasConceptScore W1992163942C139719470 @default.
- W1992163942 hasConceptScore W1992163942C142724271 @default.
- W1992163942 hasConceptScore W1992163942C162324750 @default.
- W1992163942 hasConceptScore W1992163942C171250308 @default.
- W1992163942 hasConceptScore W1992163942C178790620 @default.
- W1992163942 hasConceptScore W1992163942C185592680 @default.
- W1992163942 hasConceptScore W1992163942C192562407 @default.
- W1992163942 hasConceptScore W1992163942C204787440 @default.
- W1992163942 hasConceptScore W1992163942C2777042071 @default.
- W1992163942 hasConceptScore W1992163942C2777289219 @default.
- W1992163942 hasConceptScore W1992163942C2779227376 @default.
- W1992163942 hasConceptScore W1992163942C33347731 @default.
- W1992163942 hasConceptScore W1992163942C49040817 @default.
- W1992163942 hasConceptScore W1992163942C71924100 @default.
- W1992163942 hasConceptScore W1992163942C78434282 @default.
- W1992163942 hasIssue "1" @default.
- W1992163942 hasLocation W19921639421 @default.
- W1992163942 hasOpenAccess W1992163942 @default.
- W1992163942 hasPrimaryLocation W19921639421 @default.
- W1992163942 hasRelatedWork W1966714478 @default.
- W1992163942 hasRelatedWork W1985299032 @default.
- W1992163942 hasRelatedWork W2001429041 @default.
- W1992163942 hasRelatedWork W2003720058 @default.
- W1992163942 hasRelatedWork W2009964935 @default.
- W1992163942 hasRelatedWork W2171626108 @default.
- W1992163942 hasRelatedWork W2910556265 @default.
- W1992163942 hasRelatedWork W2994279773 @default.
- W1992163942 hasRelatedWork W3143115910 @default.
- W1992163942 hasRelatedWork W3143608133 @default.
- W1992163942 hasVolume "83" @default.
- W1992163942 isParatext "false" @default.
- W1992163942 isRetracted "false" @default.
- W1992163942 magId "1992163942" @default.
- W1992163942 workType "article" @default.