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- W1992191803 abstract "A short review on recent advances of ion beam synthesis of buried insulating layers in silicon for the purpose of forming silicon-on-insulator (SOI) structures is presented. Aspects of materials research and device processing are discussed. These include low dislocation Soi, silicon oxynitride formation, gettering in Soi-structures with epitaxial layers, minimization of unwanted doping and the beneficial effect of thin silicon layers (d ≦ 100 nm) on the properties of semiconductor devices with submicron dimensions.Es wird eine kurze ubersicht zu jungsten Entwicklungen auf dem Gebiet der Ionenstrahlsynthese von Soi-Strukturen gegeben. Es werden Aspekte der Materialforschung und der Bauelementetech-nologie diskutiert. Im einzelnen sind dies: Erzeugung von Si-Schichten mit niedriger Versetzungsdichte, Erzeugung vergrabener Silitium-oxynitridschichten, Gettereigenschaften, Minimierung unerwunschter Fremddotierung sowie der positive Einflus durch lonenstrahlsynthese herstellbarer dunner Si-Schichten (d ≦ 100 nm) auf die Eigenschaften von Bauelementen mit Submikrometerabmessungen." @default.
- W1992191803 created "2016-06-24" @default.
- W1992191803 creator A5015869819 @default.
- W1992191803 creator A5016527096 @default.
- W1992191803 creator A5061659102 @default.
- W1992191803 date "1989-04-16" @default.
- W1992191803 modified "2023-09-28" @default.
- W1992191803 title "Recent Advances of Ion Beam Synthesis for Silicon-on-Insulator Structures" @default.
- W1992191803 cites W1972907930 @default.
- W1992191803 cites W1974795946 @default.
- W1992191803 cites W2014825480 @default.
- W1992191803 cites W2017444287 @default.
- W1992191803 cites W2018127722 @default.
- W1992191803 cites W2025370323 @default.
- W1992191803 cites W2027927893 @default.
- W1992191803 cites W2031784782 @default.
- W1992191803 cites W2042014118 @default.
- W1992191803 cites W2088830786 @default.
- W1992191803 cites W2102191716 @default.
- W1992191803 cites W2143102812 @default.
- W1992191803 cites W2167643565 @default.
- W1992191803 cites W2327209800 @default.
- W1992191803 cites W2327537750 @default.
- W1992191803 cites W2062688808 @default.
- W1992191803 doi "https://doi.org/10.1002/pssa.2211120221" @default.
- W1992191803 hasPublicationYear "1989" @default.
- W1992191803 type Work @default.
- W1992191803 sameAs 1992191803 @default.
- W1992191803 citedByCount "4" @default.
- W1992191803 crossrefType "journal-article" @default.
- W1992191803 hasAuthorship W1992191803A5015869819 @default.
- W1992191803 hasAuthorship W1992191803A5016527096 @default.
- W1992191803 hasAuthorship W1992191803A5061659102 @default.
- W1992191803 hasConcept C110738630 @default.
- W1992191803 hasConcept C145148216 @default.
- W1992191803 hasConcept C171250308 @default.
- W1992191803 hasConcept C178790620 @default.
- W1992191803 hasConcept C185592680 @default.
- W1992191803 hasConcept C192562407 @default.
- W1992191803 hasConcept C2779227376 @default.
- W1992191803 hasConcept C49040817 @default.
- W1992191803 hasConcept C50774322 @default.
- W1992191803 hasConcept C53143962 @default.
- W1992191803 hasConcept C544956773 @default.
- W1992191803 hasConcept C57863236 @default.
- W1992191803 hasConceptScore W1992191803C110738630 @default.
- W1992191803 hasConceptScore W1992191803C145148216 @default.
- W1992191803 hasConceptScore W1992191803C171250308 @default.
- W1992191803 hasConceptScore W1992191803C178790620 @default.
- W1992191803 hasConceptScore W1992191803C185592680 @default.
- W1992191803 hasConceptScore W1992191803C192562407 @default.
- W1992191803 hasConceptScore W1992191803C2779227376 @default.
- W1992191803 hasConceptScore W1992191803C49040817 @default.
- W1992191803 hasConceptScore W1992191803C50774322 @default.
- W1992191803 hasConceptScore W1992191803C53143962 @default.
- W1992191803 hasConceptScore W1992191803C544956773 @default.
- W1992191803 hasConceptScore W1992191803C57863236 @default.
- W1992191803 hasLocation W19921918031 @default.
- W1992191803 hasOpenAccess W1992191803 @default.
- W1992191803 hasPrimaryLocation W19921918031 @default.
- W1992191803 hasRelatedWork W1967269550 @default.
- W1992191803 hasRelatedWork W1970026788 @default.
- W1992191803 hasRelatedWork W1973070485 @default.
- W1992191803 hasRelatedWork W1997132749 @default.
- W1992191803 hasRelatedWork W2004213070 @default.
- W1992191803 hasRelatedWork W2009905481 @default.
- W1992191803 hasRelatedWork W2023169059 @default.
- W1992191803 hasRelatedWork W2035523908 @default.
- W1992191803 hasRelatedWork W2042114056 @default.
- W1992191803 hasRelatedWork W2103569185 @default.
- W1992191803 hasRelatedWork W2167800089 @default.
- W1992191803 hasRelatedWork W3112494853 @default.
- W1992191803 hasRelatedWork W1911016116 @default.
- W1992191803 hasRelatedWork W2627038393 @default.
- W1992191803 hasRelatedWork W2735846619 @default.
- W1992191803 hasRelatedWork W2772172647 @default.
- W1992191803 hasRelatedWork W2776313470 @default.
- W1992191803 hasRelatedWork W2795440623 @default.
- W1992191803 hasRelatedWork W2796401082 @default.
- W1992191803 hasRelatedWork W2820882883 @default.
- W1992191803 isParatext "false" @default.
- W1992191803 isRetracted "false" @default.
- W1992191803 magId "1992191803" @default.
- W1992191803 workType "article" @default.