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- W1992267810 abstract "In this paper, we have identified and corrected two different mechanisms giving rise to low threshold parasitic channels and subthreshold shoulders in our FDSOI process. PMOS shoulders resulting from local gate penetration were eliminated by incorporating an edge implant and reducing BOX loss. These process modifications have significantly improved subthreshold behaviour of both n and pMOS devices and have substantially improved performance and yield of complex circuits." @default.
- W1992267810 created "2016-06-24" @default.
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- W1992267810 date "2003-01-01" @default.
- W1992267810 modified "2023-10-16" @default.
- W1992267810 title "Elimination of parasitic channels in fully depleted SOI CMOS" @default.
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- W1992267810 doi "https://doi.org/10.1109/soi.2003.1242889" @default.
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