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- W1992336346 abstract "The sensitivity of the Ag2Te/As2S3 system has been measured as a top-surface imaging, negative-tone resist between 632.8 and 193 nm. The sensitivity at g-line (435.8 nm) and i-line (365 nm) is of the order of 5 and 0.5 J/cm2, respectively, and is much too low to take advantage of the significant advantages of this resist. These advantages are high contrast (∼10), an edge effect which compensates for the reduction of optical intensity at line edges and latent image formation in a layer whose thickness is significantly less than the depth-of-focus of high resolution stepper optical systems. Measurements at 248 and 193 nm show significantly higher sensitivity of 350 and 80 mJ/cm2, respectively, suggesting that this system may possess practical potential at these wavelengths. Exposures on a GCA XLS-7500 stepper with 0.42 NA at 365 nm have yielded 0.35 μm linewidths." @default.
- W1992336346 created "2016-06-24" @default.
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- W1992336346 date "1994-01-01" @default.
- W1992336346 modified "2023-09-27" @default.
- W1992336346 title "Ag2Te/As2S3, a top-surface, high-contrast negative-tone resist for deep ultraviolet submicron lithography" @default.
- W1992336346 doi "https://doi.org/10.1116/1.587099" @default.
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