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- W1992382182 abstract "CMOS compatible optical polyimide based thermo-optic switches have the potential use as low-power switches. These switches would have many advantages over other switches based on inorganic crystals. For one, they can be integrated into module-to-module systems using currently available VLSI fabrication techniques. Polyimide based, 1 by 2 thermo-optic switches are fabricated onto silicon wafers and tested. We report the properties and characteristics of digital thermo- optic switches designed to operate at 1.3 micrometers . Also, the switching characteristics at different heating electrode voltages are tested and compared." @default.
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- W1992382182 date "2000-04-27" @default.
- W1992382182 modified "2023-09-23" @default.
- W1992382182 title "<title>Fabrication and testing of polyimide thermo-optic switches</title>" @default.
- W1992382182 doi "https://doi.org/10.1117/12.384402" @default.
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