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- W1992449797 abstract "Synchrotron radiation x-ray lithography, using commercial x-ray masks, has been used in a mix-and-match scheme with an optical stepper to fabricate functional 0.3 μm gate-length n-type metal–oxide–semiconductor devices. The x-ray exposures were done at the Center for X-ray Lithography (CXrL) at the University of Wisconsin-Madison. The gate-level mask was fabricated to our specifications by Perkin-Elmer Advanced Lithography Operations, Danbury, CT. All other processing and the optical stepper exposures were carried out at the McDonnell Douglas Electronics Systems Company—Microelectronics Center, St. Louis, MO. Processing results and device characteristics are discussed." @default.
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- W1992449797 date "1990-05-01" @default.
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- W1992449797 title "Synchrotron radiation x-ray lithography fabrication of 0.35 μm gate-length n-type metal–oxide–semiconductor transistors" @default.
- W1992449797 doi "https://doi.org/10.1116/1.585041" @default.
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