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• W1992537047 abstract "In this paper we report on the design, fabrication and characterization of terahertz (THz) bi-material sensors with metamaterial absorbers. MEMS fabrication-friendly SiOx and Al are used to maximize the bimetallic effect and metamaterial absorption at 3.8 THz, the frequency of a quantum cascade laser illumination source. Sensors with different configurations were fabricated and the measured absorption is near 100% and responsivity is around 1.2 deg/μW, which agree well with finite element simulations. The results indicate the potential of using these detectors to fabricate focal plane arrays for real time THz imaging." @default.
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• W1992537047 date "2013-05-23" @default.
• W1992537047 modified "2023-09-23" @default.
• W1992537047 title "Bi-material terahertz sensors using metamaterial structures" @default.
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• W1992537047 doi "https://doi.org/10.1364/oe.21.013256" @default.
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