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• W1992596054 abstract "A bimorph varifocal micromirror actuated thermoelectrically by a Peltier element is reported. The single-crystal silicon micromirror is 1.2 mm in diameter with a centered 1-mm-diameter gold coating for broadband reflection. The actuation principle is capable of varying the micromirror temperature above and below the ambient temperature, which contributed to a 57% improvement in the addressable curvature range in comparison to previously reported electrothermal and optothermal actuation techniques for the device. Altering the device temperature from 10 °C to 100 °C provided a mirror surface radius of curvature variation from 19.2 to 30.9 mm, respectively. The experimental characterization of the micromirror was used as a basis for accurate finite-element modeling of the device and its actuation. Negligible optical aberrations are observed over the operating range, enabling effectively aberration-free imaging. Demonstration in an optical imaging system illustrated sharp imaging of objects over a focal plane variation of 212 mm." @default.
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• W1992596054 date "2015-07-01" @default.
• W1992596054 modified "2023-10-14" @default.
• W1992596054 title "Range Extension of a Bimorph Varifocal Micromirror Through Actuation by a Peltier Element" @default.
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• W1992596054 doi "https://doi.org/10.1109/jstqe.2014.2381464" @default.
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