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- W1992634697 abstract "Thin film bulk acoustic wave resonator (FBAR) devices supporting simultaneously multiple resonance modes have been designed for gravimetric sensing. The mechanism for dual-mode generation within a single device has been discussed, and theoretical calculations based on finite element analysis allowed the fabrication of FBARs whose resonance modes have opposite reactions to temperature changes; one of the modes exhibiting a positive frequency shift for a rise of temperature whilst the other mode exhibits a negative shift. Both modes exhibit negative frequency shift for a mass load and hence by monitoring simultaneously both modes it is possible to distinguish whether a change in the resonance frequency is due to a mass load or temperature variation (or a combination of both), avoiding false positive/negative responses in gravimetric sensing without the need of additional reference devices or complex electronics." @default.
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- W1992634697 date "2012-10-01" @default.
- W1992634697 modified "2023-10-17" @default.
- W1992634697 title "Dual-mode thin film bulk acoustic wave resonators for parallel sensing of temperature and mass loading" @default.
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- W1992634697 doi "https://doi.org/10.1016/j.bios.2012.06.023" @default.
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