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• W1992681726 abstract "The kinetics of wet thermal oxidation of both n-type and p-type doped 6H-SiC epitaxial layers grown on p-type 6H-SiC wafers has been investigated. The oxidation rates are affected significantly by doping concentration. The kinetics of wet thermal oxidation abides by the Deal–Grove model B. E. Deal and A. S. Grove, [J. Appl. Phys. 36, 3770 (1965)]. The linear oxidation rate constant B/A and the parabolic oxidation rate constant B are obtained by fitting the measured data to the Deal–Grove model." @default.
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• W1992681726 date "2011-01-24" @default.
• W1992681726 modified "2023-09-27" @default.
• W1992681726 title "Thermal oxidation of silicon carbide: A comparison of n-type and p-type doped epitaxial layers" @default.
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• W1992681726 doi "https://doi.org/10.1063/1.3549294" @default.
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