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- W1992687584 abstract "The advantage of focused Xe+ beams over other rare gas species have been investigated [Zhukov, V.; Kalbitzer, S. Russ. Microelectron. 2011, 40 (1), 17–24]. In particular, the higher operation temperature of a super-tip gas field ion source for xenon ions is one outstanding technical feature. The properties of focused Xe+ beams are estimated with special reference to optimised ion-optical transport systems. Applications to both ion beam materials modification and ion beam materials analysis are outlined." @default.
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- W1992687584 date "2011-11-01" @default.
- W1992687584 modified "2023-09-24" @default.
- W1992687584 title "Xenon nano-beams for materials research" @default.
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- W1992687584 doi "https://doi.org/10.1080/10420150.2011.594351" @default.
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