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- W1992716984 abstract "This paper presents design of a Film Bulk Acoustic Wave Resonators (FBARs) consisting of piezoelectric film, aluminium nitride (AlN) with top and bottom electrodes of ruthenium (Ru). The lumped Butterworth-Van Dyke (BVD) Circuit model is used to investigate the theoretical harmonic response and extraction equivalent circuit of the FBAR. A three-dimensional (3D) Finite Element Method (FEM) is used to evaluate the electro-mechanical performance of the FBAR. The one-dimension (1D) numerical and the 3D FEM simulation results are analysed and compared. The results show that coupling coefficient (k<sup>2</sup> <sub>eff</sub>) up to 7.0% can be obtained with optimised thickness ratio of electrode/piezoelectric layers. A Figure of Merit (FOM) that considers k<sup>2</sup> <sub>eff </sub> and quality (Q) factor is used for comparison. The area of FBAR is 900μm<sup>2</sup> and the active filter area size of the FBAR filter is 5400μm<sup>2</sup>. The FBAR filter is designed for operation in Kuband with centre frequency of 15.5 GHz and fractional bandwidth of 2.6%. The proposed FBAR filter has insertion loss of -2.3dB which will improve the performance of Ku-band transceiver and improve communication range and data rates in Ku-band communication links." @default.
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- W1992716984 date "2012-04-26" @default.
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- W1992716984 title "Design and analysis of film bulk acoustic wave resonator in Ku-band frequency for wireless communication" @default.
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- W1992716984 doi "https://doi.org/10.1117/12.915042" @default.
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