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- W1992751075 abstract "When a vacuum system containing particle-free, cleanroom air is pumped down from atmospheric pressure to produce a vacuum, the gas in the chamber expands and cools to cause water vapor condensation and droplet formation. Experiments have been performed to show that a stable aerosol of submicrometer residue particles on the order of 0.2 μm are formed when the water droplets have re-evaporated. The residue particles are spherical in shape and appear to contain mainly sulfuric acid" @default.
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- W1992751075 date "1993-05-01" @default.
- W1992751075 modified "2023-09-25" @default.
- W1992751075 title "Condensation‐Induced Particle Formation during Vacuum Pump Down" @default.
- W1992751075 doi "https://doi.org/10.1149/1.2221580" @default.
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