Matches in SemOpenAlex for { <https://semopenalex.org/work/W1992811425> ?p ?o ?g. }
- W1992811425 endingPage "290" @default.
- W1992811425 startingPage "281" @default.
- W1992811425 abstract "Abstract Production conditions of the condensed phases ( β ‐SiC, silicon, and graphite) in the CVD of methyltrichlorosilane (MTS) pyrolysis are investigated in detail with thermodynamic analyses based on a relatively complete and refined database. Production of the condensed phases is examined as a function of temperature, pressure, and the initial gas ratio of H 2 /MTS. The results show that the composition of the condensed phase is quite sensitive to both temperature and the molar ratio of H 2 /MTS, whereas it is less sensitive to pressure. The ideal conditions for the deposition of β ‐SiC are temperatures between 1300 and 1500 K, H 2 /MTS ratios between 10 and 10 5 , and with pressures as low as convenient. The co‐deposition of C or Si with β ‐SiC is mainly controlled by the ratio of H 2 /MTS. The co‐deposition of C with β ‐SiC should be in low H 2 /MTS ratios (<10) and the co‐deposition of Si with β ‐SiC needs high H 2 /MTS ratios (>10 4 ). The results are in very good agreement with experimental findings and previous theoretical investigations. The present work is also instructive as to the experimental conditions relating to continuous regions of temperatures, pressures, and the H 2 /MTS ratios." @default.
- W1992811425 created "2016-06-24" @default.
- W1992811425 creator A5006837678 @default.
- W1992811425 creator A5007940316 @default.
- W1992811425 creator A5021488921 @default.
- W1992811425 creator A5069068990 @default.
- W1992811425 creator A5072912162 @default.
- W1992811425 creator A5079595789 @default.
- W1992811425 creator A5090674409 @default.
- W1992811425 date "2009-12-01" @default.
- W1992811425 modified "2023-10-17" @default.
- W1992811425 title "Thermodynamics of the Production of Condensed Phases in the CVD of Methyltrichlorosilane Pyrolysis" @default.
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- W1992811425 cites W115083903 @default.
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- W1992811425 cites W1989305578 @default.
- W1992811425 cites W1990523377 @default.
- W1992811425 cites W1994650983 @default.
- W1992811425 cites W1997817912 @default.
- W1992811425 cites W2000038848 @default.
- W1992811425 cites W2002035659 @default.
- W1992811425 cites W2004404560 @default.
- W1992811425 cites W2011584818 @default.
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- W1992811425 cites W2015237536 @default.
- W1992811425 cites W2017694025 @default.
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- W1992811425 cites W2039616483 @default.
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- W1992811425 cites W2052165313 @default.
- W1992811425 cites W2054052911 @default.
- W1992811425 cites W2056925462 @default.
- W1992811425 cites W2060196139 @default.
- W1992811425 cites W2061096450 @default.
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- W1992811425 cites W2066491332 @default.
- W1992811425 cites W2068778618 @default.
- W1992811425 cites W2070117986 @default.
- W1992811425 cites W2070760239 @default.
- W1992811425 cites W2071779590 @default.
- W1992811425 cites W2072076984 @default.
- W1992811425 cites W2079531599 @default.
- W1992811425 cites W2085414990 @default.
- W1992811425 cites W2087663173 @default.
- W1992811425 cites W2090549334 @default.
- W1992811425 cites W2094279554 @default.
- W1992811425 cites W2098701827 @default.
- W1992811425 cites W2109834520 @default.
- W1992811425 cites W2117082547 @default.
- W1992811425 cites W2130235344 @default.
- W1992811425 cites W2132979770 @default.
- W1992811425 cites W2137254578 @default.
- W1992811425 cites W2144593871 @default.
- W1992811425 cites W2149089906 @default.
- W1992811425 cites W2164237530 @default.
- W1992811425 cites W2949801043 @default.
- W1992811425 cites W3170465608 @default.
- W1992811425 doi "https://doi.org/10.1002/cvde.200806757" @default.
- W1992811425 hasPublicationYear "2009" @default.
- W1992811425 type Work @default.
- W1992811425 sameAs 1992811425 @default.
- W1992811425 citedByCount "4" @default.
- W1992811425 countsByYear W19928114252013 @default.
- W1992811425 countsByYear W19928114252021 @default.
- W1992811425 countsByYear W19928114252022 @default.
- W1992811425 crossrefType "journal-article" @default.
- W1992811425 hasAuthorship W1992811425A5006837678 @default.
- W1992811425 hasAuthorship W1992811425A5007940316 @default.
- W1992811425 hasAuthorship W1992811425A5021488921 @default.
- W1992811425 hasAuthorship W1992811425A5069068990 @default.