FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W1992910879> ?p ?o ?g. }

• W1992910879 endingPage "1239" @default.
• W1992910879 startingPage "1228" @default.
• W1992910879 abstract "Double patterning lithography (DPL) technologies have become a must for today's sub-32 nm technology nodes. Currently, there are two leading DPL technologies: self-aligned double patterning (SADP) and litho-etch-litho-etch (LELE). Among them, SADP has the significant advantage over LELE in its ability to avoid overlay, making it the likely DPL candidate for the next technology node of 14 nm. In any DPL technology, layout decomposition is the key problem. While the layout decomposition problem for LELE has been well studied in the literature, only a few attempts have been made to address the SADP layout decomposition problem. In this paper, we present a polynomial time exact (optimal) algorithm to determine if a given layout has SADP decompositions that do not have any overlay at specified critical edges. The previous approaches tried to minimize the total overlay of a given layout, which may be a problematic objective. Furthermore, all previous exact algorithms were computationally expensive exponential time algorithms based on SAT or ILP. Other previous algorithms for the problem were heuristics without having any guarantee that an overlay-free solution can be found even if one exists." @default.
• W1992910879 created "2016-06-24" @default.
• W1992910879 creator A5010400310 @default.
• W1992910879 creator A5053378706 @default.
• W1992910879 creator A5069931478 @default.
• W1992910879 creator A5090567275 @default.
• W1992910879 date "2013-08-01" @default.
• W1992910879 modified "2023-09-25" @default.
• W1992910879 title "A Polynomial Time Exact Algorithm for Overlay-Resistant Self-Aligned Double Patterning (SADP) Layout Decomposition" @default.
• W1992910879 cites W2031823362 @default.
• W1992910879 cites W2033404897 @default.
• W1992910879 cites W2070822532 @default.
• W1992910879 cites W2107458461 @default.
• W1992910879 cites W2108352706 @default.
• W1992910879 cites W2126301723 @default.
• W1992910879 cites W2156916628 @default.
• W1992910879 cites W2161958538 @default.
• W1992910879 cites W2485905123 @default.
• W1992910879 cites W4254569978 @default.
• W1992910879 doi "https://doi.org/10.1109/tcad.2013.2252054" @default.
• W1992910879 hasPublicationYear "2013" @default.
• W1992910879 type Work @default.
• W1992910879 sameAs 1992910879 @default.
• W1992910879 citedByCount "24" @default.
• W1992910879 countsByYear W19929108792013 @default.
• W1992910879 countsByYear W19929108792014 @default.
• W1992910879 countsByYear W19929108792015 @default.
• W1992910879 countsByYear W19929108792016 @default.
• W1992910879 countsByYear W19929108792017 @default.
• W1992910879 countsByYear W19929108792018 @default.
• W1992910879 crossrefType "journal-article" @default.
• W1992910879 hasAuthorship W1992910879A5010400310 @default.
• W1992910879 hasAuthorship W1992910879A5053378706 @default.
• W1992910879 hasAuthorship W1992910879A5069931478 @default.
• W1992910879 hasAuthorship W1992910879A5090567275 @default.
• W1992910879 hasConcept C110875604 @default.
• W1992910879 hasConcept C111919701 @default.
• W1992910879 hasConcept C11413529 @default.
• W1992910879 hasConcept C124681953 @default.
• W1992910879 hasConcept C127413603 @default.
• W1992910879 hasConcept C127705205 @default.
• W1992910879 hasConcept C134306372 @default.
• W1992910879 hasConcept C136085584 @default.
• W1992910879 hasConcept C136764020 @default.
• W1992910879 hasConcept C169851745 @default.
• W1992910879 hasConcept C171250308 @default.
• W1992910879 hasConcept C177409738 @default.
• W1992910879 hasConcept C18903297 @default.
• W1992910879 hasConcept C192562407 @default.
• W1992910879 hasConcept C199360897 @default.
• W1992910879 hasConcept C26517878 @default.
• W1992910879 hasConcept C2779227376 @default.
• W1992910879 hasConcept C311688 @default.
• W1992910879 hasConcept C33923547 @default.
• W1992910879 hasConcept C38652104 @default.
• W1992910879 hasConcept C41008148 @default.
• W1992910879 hasConcept C53524968 @default.
• W1992910879 hasConcept C62611344 @default.
• W1992910879 hasConcept C66938386 @default.
• W1992910879 hasConcept C86803240 @default.
• W1992910879 hasConcept C90119067 @default.
• W1992910879 hasConceptScore W1992910879C110875604 @default.
• W1992910879 hasConceptScore W1992910879C111919701 @default.
• W1992910879 hasConceptScore W1992910879C11413529 @default.
• W1992910879 hasConceptScore W1992910879C124681953 @default.
• W1992910879 hasConceptScore W1992910879C127413603 @default.
• W1992910879 hasConceptScore W1992910879C127705205 @default.
• W1992910879 hasConceptScore W1992910879C134306372 @default.
• W1992910879 hasConceptScore W1992910879C136085584 @default.
• W1992910879 hasConceptScore W1992910879C136764020 @default.
• W1992910879 hasConceptScore W1992910879C169851745 @default.
• W1992910879 hasConceptScore W1992910879C171250308 @default.
• W1992910879 hasConceptScore W1992910879C177409738 @default.
• W1992910879 hasConceptScore W1992910879C18903297 @default.
• W1992910879 hasConceptScore W1992910879C192562407 @default.
• W1992910879 hasConceptScore W1992910879C199360897 @default.
• W1992910879 hasConceptScore W1992910879C26517878 @default.
• W1992910879 hasConceptScore W1992910879C2779227376 @default.
• W1992910879 hasConceptScore W1992910879C311688 @default.
• W1992910879 hasConceptScore W1992910879C33923547 @default.
• W1992910879 hasConceptScore W1992910879C38652104 @default.
• W1992910879 hasConceptScore W1992910879C41008148 @default.
• W1992910879 hasConceptScore W1992910879C53524968 @default.
• W1992910879 hasConceptScore W1992910879C62611344 @default.
• W1992910879 hasConceptScore W1992910879C66938386 @default.
• W1992910879 hasConceptScore W1992910879C86803240 @default.
• W1992910879 hasConceptScore W1992910879C90119067 @default.
• W1992910879 hasIssue "8" @default.
• W1992910879 hasLocation W19929108791 @default.
• W1992910879 hasOpenAccess W1992910879 @default.
• W1992910879 hasPrimaryLocation W19929108791 @default.
• W1992910879 hasRelatedWork W2002046412 @default.
• W1992910879 hasRelatedWork W2015381354 @default.
• W1992910879 hasRelatedWork W2046206692 @default.
• W1992910879 hasRelatedWork W2083350702 @default.
• W1992910879 hasRelatedWork W2097580618 @default.
• W1992910879 hasRelatedWork W2358373552 @default.
• W1992910879 hasRelatedWork W2953147964 @default.

• next