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- W1993227982 abstract "Es wird ein Weg zur thermodynamischen Berechnung der Darstellungsbedingungen binärer und komplizierterer Verbindungen durch Gasphasenabscheidung beschrieben, und damit werden die Abscheidungsbedingungen der reinen SiC-Phase im System Si–C–Cl–H sowie die Koabscheidungsbedingungen mit den benachbarten Phasen ermittelt. Die experimentelle Überprüfung der relative großen berechneten Darstellungsbereiche ergab insbesondere oberhalb 1700 K eine gute Übereinstimmung. A method is described for the calculation of the preparation conditions of binary and more complicated compounds by vapour phase deposition basing upon their thermodynamics. With that the deposition conditions of the pure SiC-Phase in the system Si–C–Cl–H and the codeposition conditions of the coexisting phases were determined. The experimental results are in a good agreement with the considerable large preparation regions found by calculation, expecially above 1700 K." @default.
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- W1993227982 date "1978-01-01" @default.
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- W1993227982 title "Zur Thermodynamik des Systems Si–C–Cl–H und Darstellung von phasenreinem SiC" @default.
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- W1993227982 doi "https://doi.org/10.1002/crat.19780130411" @default.
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