FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W1993298045> ?p ?o ?g. }

• W1993298045 endingPage "4373" @default.
• W1993298045 startingPage "4368" @default.
• W1993298045 abstract "A two-dimensional fluid simulation code has been developed for self-consistent calculations of wave propagations, plasma transports, and gas phase chemical reactions in a microwave plasma reactor equipped with a dual shower plate type gas feeder for the material gas injection. In this code, wave propagation and resonant absorption in nonuniform plasmas, plasma transport, and generation and diffusion of radicals in the reactor with complex structures are considered. According to the simulation, the gas feeder divides the plasma into two regions: a plasma source and a diffusion regions, and it is effective to the improvement of uniformities near the stage." @default.
• W1993298045 created "2016-06-24" @default.
• W1993298045 creator A5057317036 @default.
• W1993298045 creator A5070838793 @default.
• W1993298045 creator A5072547705 @default.
• W1993298045 creator A5079452533 @default.
• W1993298045 creator A5090349327 @default.
• W1993298045 date "2008-05-01" @default.
• W1993298045 modified "2023-10-14" @default.
• W1993298045 title "A practical simulation scheme for slot-excited microwave plasma reactor equipped with dual shower plate" @default.
• W1993298045 cites W1495570964 @default.
• W1993298045 cites W1971532419 @default.
• W1993298045 cites W1972032866 @default.
• W1993298045 cites W1972908068 @default.
• W1993298045 cites W1988661067 @default.
• W1993298045 cites W1991467866 @default.
• W1993298045 cites W1991785415 @default.
• W1993298045 cites W2007268737 @default.
• W1993298045 cites W2010381141 @default.
• W1993298045 cites W2011931223 @default.
• W1993298045 cites W2025613059 @default.
• W1993298045 cites W2035443817 @default.
• W1993298045 cites W2050183138 @default.
• W1993298045 cites W2052199444 @default.
• W1993298045 cites W2056360079 @default.
• W1993298045 cites W2068839994 @default.
• W1993298045 cites W2079227975 @default.
• W1993298045 cites W2079297207 @default.
• W1993298045 cites W2081383977 @default.
• W1993298045 cites W2150237881 @default.
• W1993298045 cites W4234006402 @default.
• W1993298045 doi "https://doi.org/10.1016/j.tsf.2007.10.025" @default.
• W1993298045 hasPublicationYear "2008" @default.
• W1993298045 type Work @default.
• W1993298045 sameAs 1993298045 @default.
• W1993298045 citedByCount "10" @default.
• W1993298045 countsByYear W19932980452012 @default.
• W1993298045 countsByYear W19932980452013 @default.
• W1993298045 countsByYear W19932980452018 @default.
• W1993298045 countsByYear W19932980452023 @default.
• W1993298045 crossrefType "journal-article" @default.
• W1993298045 hasAuthorship W1993298045A5057317036 @default.
• W1993298045 hasAuthorship W1993298045A5070838793 @default.
• W1993298045 hasAuthorship W1993298045A5072547705 @default.
• W1993298045 hasAuthorship W1993298045A5079452533 @default.
• W1993298045 hasAuthorship W1993298045A5090349327 @default.
• W1993298045 hasConcept C120665830 @default.
• W1993298045 hasConcept C121332964 @default.
• W1993298045 hasConcept C125287762 @default.
• W1993298045 hasConcept C178790620 @default.
• W1993298045 hasConcept C181500209 @default.
• W1993298045 hasConcept C184779094 @default.
• W1993298045 hasConcept C185544564 @default.
• W1993298045 hasConcept C185592680 @default.
• W1993298045 hasConcept C30475298 @default.
• W1993298045 hasConcept C44280652 @default.
• W1993298045 hasConcept C44838205 @default.
• W1993298045 hasConcept C57879066 @default.
• W1993298045 hasConcept C59032088 @default.
• W1993298045 hasConcept C62520636 @default.
• W1993298045 hasConcept C69357855 @default.
• W1993298045 hasConcept C82706917 @default.
• W1993298045 hasConcept C97355855 @default.
• W1993298045 hasConceptScore W1993298045C120665830 @default.
• W1993298045 hasConceptScore W1993298045C121332964 @default.
• W1993298045 hasConceptScore W1993298045C125287762 @default.
• W1993298045 hasConceptScore W1993298045C178790620 @default.
• W1993298045 hasConceptScore W1993298045C181500209 @default.
• W1993298045 hasConceptScore W1993298045C184779094 @default.
• W1993298045 hasConceptScore W1993298045C185544564 @default.
• W1993298045 hasConceptScore W1993298045C185592680 @default.
• W1993298045 hasConceptScore W1993298045C30475298 @default.
• W1993298045 hasConceptScore W1993298045C44280652 @default.
• W1993298045 hasConceptScore W1993298045C44838205 @default.
• W1993298045 hasConceptScore W1993298045C57879066 @default.
• W1993298045 hasConceptScore W1993298045C59032088 @default.
• W1993298045 hasConceptScore W1993298045C62520636 @default.
• W1993298045 hasConceptScore W1993298045C69357855 @default.
• W1993298045 hasConceptScore W1993298045C82706917 @default.
• W1993298045 hasConceptScore W1993298045C97355855 @default.
• W1993298045 hasIssue "13" @default.
• W1993298045 hasLocation W19932980451 @default.
• W1993298045 hasOpenAccess W1993298045 @default.
• W1993298045 hasPrimaryLocation W19932980451 @default.
• W1993298045 hasRelatedWork W1971978554 @default.
• W1993298045 hasRelatedWork W2010858082 @default.
• W1993298045 hasRelatedWork W2025058865 @default.
• W1993298045 hasRelatedWork W2038599716 @default.
• W1993298045 hasRelatedWork W2060051479 @default.
• W1993298045 hasRelatedWork W2086872829 @default.
• W1993298045 hasRelatedWork W2091949762 @default.
• W1993298045 hasRelatedWork W3186290646 @default.
• W1993298045 hasRelatedWork W4233759044 @default.
• W1993298045 hasRelatedWork W4296449510 @default.
• W1993298045 hasVolume "516" @default.
• W1993298045 isParatext "false" @default.
• W1993298045 isRetracted "false" @default.
• W1993298045 magId "1993298045" @default.

• next